OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 21 — Jul. 20, 2008
  • pp: 3773–3777

Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC

G. Logan DesAutels, Peter Powers, Chris Brewer, Mark Walker, Mark Burky, and Gregg Anderson  »View Author Affiliations

Applied Optics, Vol. 47, Issue 21, pp. 3773-3777 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (2259 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



An optical temperature sensor was created using a femtosecond micromachined diffraction grating inside transparent bulk 6H-SiC, and to the best of our knowledge, this is a novel technique of measuring temperature. Other methods of measuring temperature using fiber Bragg gratings have been devised by other groups such as Zhang and Kahrizi [in MEMS, NANO, and Smart Systems (IEEE, 2005)]. This temperature sensor was, to the best of our knowledge, also used for a novel method of measuring the linear and nonlinear coefficients of the thermal expansion of transparent and nontransparent materials by means of the grating first-order diffracted beam. Furthermore the coefficient of thermal expansion of 6H-SiC was measured using this new technique. A He–Ne laser beam was used with the SiC grating to produce a first-order diffracted beam where the change in deflection height was measured as a function of temperature. The grating was micromachined with a 20 μm spacing and has dimensions of approximately 500 μm × 500 μm ( l × w ) and is roughly 0.5 μm deep into the 6H-SiC bulk. A minimum temperature of 26.7 ° C and a maximum temperature of 399 ° C were measured, which gives a Δ T of 372.3 ° C . The sensitivity of the technique is Δ T = 5 ° C . A maximum deflection angle of 1.81 ° was measured in the first-order diffracted beam. The trend of the deflection with increasing temperature is a nonlinear polynomial of the second-order. This optical SiC thermal sensor has many high-temperature electronic applications such as aircraft turbine and gas tank monitoring for commercial and military applications.

© 2008 Optical Society of America

OCIS Codes
(050.7330) Diffraction and gratings : Volume gratings
(280.6780) Remote sensing and sensors : Temperature

ToC Category:
Diffraction and Gratings

Original Manuscript: February 4, 2008
Revised Manuscript: May 7, 2008
Manuscript Accepted: June 18, 2008
Published: July 11, 2008

G. Logan DesAutels, Peter Powers, Chris Brewer, Mark Walker, Mark Burky, and Gregg Anderson, "Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC," Appl. Opt. 47, 3773-3777 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. L. DesAutels, C. Brewer, M. Walker, S. Juhl, M. Finet, and P. Powers, “Femtosecond micromachining in transparent bulk materials using an anamorphic lens,” Opt. Express 15, 13139-13148 (2007). [CrossRef] [PubMed]
  2. J. Copper, Purdue Wide Band Gap Semiconductor Device Research Program, http://www.ecn.purdue.edu/WBG/Index.html, Purdue University College of Engineering.
  3. D. Bath and E. Ness, “Applying silicon carbide to optics,” Optics Photonics News 19, 10-13 (2008). [CrossRef]
  4. R. Serway, Physics For Scientists & Engineers, 3rd ed.(Saunders, 1999), pp. 513-515.
  5. C. Palmer, Diffraction Grating Handbook (Richardson Grating Laboratory, 2002).
  6. R. T. Bhatt and A. R. Palczer, “Effects of thermal cycling on thermal expansion and mechanical properties of SiC fiber-reinforced reaction-bonded Si3N4 composites,” NASA Technical Memorandum 106665 (Army Research Laboratory, 1992), pp. 1-15.
  7. Z. Li and R. Bradt, “Thermal expansion of the hexagonal (4H) polytype of SiC,” J. Appl. Phys. 60, 612-614 (1986). [CrossRef]
  8. D. N. Talwar and J. C. Sherbondy, “Thermal expansion coefficient of 3C-SiC,” Appl. Phys. Lett. 67, 3301-3303 (1995). [CrossRef]
  9. J. W. Goodman, Introduction to Fourier Optics (Roberts and Company, 2005).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited