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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 21 — Jul. 20, 2008
  • pp: 3773–3777

Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC

G. Logan DesAutels, Peter Powers, Chris Brewer, Mark Walker, Mark Burky, and Gregg Anderson  »View Author Affiliations


Applied Optics, Vol. 47, Issue 21, pp. 3773-3777 (2008)
http://dx.doi.org/10.1364/AO.47.003773


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Abstract

An optical temperature sensor was created using a femtosecond micromachined diffraction grating inside transparent bulk 6H-SiC, and to the best of our knowledge, this is a novel technique of measuring temperature. Other methods of measuring temperature using fiber Bragg gratings have been devised by other groups such as Zhang and Kahrizi [in MEMS, NANO, and Smart Systems (IEEE, 2005)]. This temperature sensor was, to the best of our knowledge, also used for a novel method of measuring the linear and nonlinear coefficients of the thermal expansion of transparent and nontransparent materials by means of the grating first-order diffracted beam. Furthermore the coefficient of thermal expansion of 6H-SiC was measured using this new technique. A He–Ne laser beam was used with the SiC grating to produce a first-order diffracted beam where the change in deflection height was measured as a function of temperature. The grating was micromachined with a 20 μm spacing and has dimensions of approximately 500 μm × 500 μm ( l × w ) and is roughly 0.5 μm deep into the 6H-SiC bulk. A minimum temperature of 26.7 ° C and a maximum temperature of 399 ° C were measured, which gives a Δ T of 372.3 ° C . The sensitivity of the technique is Δ T = 5 ° C . A maximum deflection angle of 1.81 ° was measured in the first-order diffracted beam. The trend of the deflection with increasing temperature is a nonlinear polynomial of the second-order. This optical SiC thermal sensor has many high-temperature electronic applications such as aircraft turbine and gas tank monitoring for commercial and military applications.

© 2008 Optical Society of America

OCIS Codes
(050.7330) Diffraction and gratings : Volume gratings
(280.6780) Remote sensing and sensors : Temperature

ToC Category:
Diffraction and Gratings

History
Original Manuscript: February 4, 2008
Revised Manuscript: May 7, 2008
Manuscript Accepted: June 18, 2008
Published: July 11, 2008

Citation
G. Logan DesAutels, Peter Powers, Chris Brewer, Mark Walker, Mark Burky, and Gregg Anderson, "Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC," Appl. Opt. 47, 3773-3777 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-21-3773

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