To take advantage of phase-only filters to reduce reflected stray light, two phase plates are used in a synthetic complex superresolving pupil filter to get a small spot for laser direct writing. The amplitude modulation in a conventional complex superresolving pupil filter (CCSPF) is substituted by an equivalent phase modulation. The equivalence between the proposed filter and a CCSPF is established for a general design. The effectiveness of the proposed filter was proven through experiments to obtain a small main lobe width of 0.86 times the size of the airy spot.
© 2008 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: November 5, 2007
Revised Manuscript: February 25, 2008
Manuscript Accepted: June 16, 2008
Published: July 14, 2008
Jian Liu, Jiubin Tan, and Yanchao Wang, "Synthetic complex superresolving pupil filter based on double-beam phase modulation," Appl. Opt. 47, 3803-3807 (2008)