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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 21 — Jul. 20, 2008
  • pp: 3803–3807

Synthetic complex superresolving pupil filter based on double-beam phase modulation

Jian Liu, Jiubin Tan, and Yanchao Wang  »View Author Affiliations

Applied Optics, Vol. 47, Issue 21, pp. 3803-3807 (2008)

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To take advantage of phase-only filters to reduce reflected stray light, two phase plates are used in a synthetic complex superresolving pupil filter to get a small spot for laser direct writing. The amplitude modulation in a conventional complex superresolving pupil filter (CCSPF) is substituted by an equivalent phase modulation. The equivalence between the proposed filter and a CCSPF is established for a general design. The effectiveness of the proposed filter was proven through experiments to obtain a small main lobe width of 0.86 times the size of the airy spot.

© 2008 Optical Society of America

OCIS Codes
(100.6640) Image processing : Superresolution
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(220.1230) Optical design and fabrication : Apodization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 5, 2007
Revised Manuscript: February 25, 2008
Manuscript Accepted: June 16, 2008
Published: July 14, 2008

Jian Liu, Jiubin Tan, and Yanchao Wang, "Synthetic complex superresolving pupil filter based on double-beam phase modulation," Appl. Opt. 47, 3803-3807 (2008)

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