Application of the astigmatic method to the thickness measurement of glass substrates
Applied Optics, Vol. 47, Issue 21, pp. 3968-3972 (2008)
http://dx.doi.org/10.1364/AO.47.003968
Enhanced HTML 
Acrobat PDF (544 KB)
Abstract
We developed a high accuracy thickness measurement system for glass substrates based on the optical design of the astigmatic method. The astigmatic optical system includes a laser diode, a cylindrical lens, a convex lens, and a quadrant detector. This method measures the astigmatic focusing error signal induced from the measured glass placed in the astigmatic optical system. The astigmatic focusing error signal is converted into the thickness of the glass substrate. The proposed glass thickness measurement system is verified by using a coordinate measuring machine (CMM). The accuracy of the proposed system is
© 2008 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: May 23, 2008
Manuscript Accepted: June 26, 2008
Published: July 18, 2008
Citation
Chien-Hung Liu and Zong-Han Li, "Application of the astigmatic method to the thickness measurement of glass substrates," Appl. Opt. 47, 3968-3972 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-21-3968
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Three-Dimensional Vision Based on a Combination of Gray-Code and Phase-Shift Light Projection: Analysis and Compensation of the Systematic Errors (AO)
- French Transportable Laser Ranging Station: Scientific Objectives, Technical Features, and Performance (AO)
- Total Internal Reflection for Precision Small-Angle Measurement (AO)
- Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device (AO)
- System for Monitoring the Focal Position in Laser Material Processing (AO)
Related Conference Papers
- Carrier-Envelope Phase Stabilization Using Single-Pulse Coherent Control in a Semiconductor
- Traceable radius measurements of micro-lenses
- Traceable radius measurements of micro-lenses
- High-Accuracy Form Measurement with Multiple Sensor Systems
- Technology and Applications of Miniature Atomic Magnetometers
« Previous Article | Next Article »
OSA is a member of 