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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 25 — Sep. 1, 2008
  • pp: 4555–4559

Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing

Antonios V. Giannopoulos, Ansas M. Kasten, Christopher M. Long, Chen Chen, and Kent D. Choquette  »View Author Affiliations


Applied Optics, Vol. 47, Issue 25, pp. 4555-4559 (2008)
http://dx.doi.org/10.1364/AO.47.004555


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Abstract

Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/ intrinsic/n-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38 A / W at 840 nm . The optical cross talk between VCSELs and detectors is also quantified.

© 2008 Optical Society of America

OCIS Codes
(130.5990) Integrated optics : Semiconductors
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers

ToC Category:
Integrated Optics

History
Original Manuscript: January 10, 2008
Revised Manuscript: June 18, 2008
Manuscript Accepted: July 16, 2008
Published: August 27, 2008

Citation
Antonios V. Giannopoulos, Ansas M. Kasten, Christopher M. Long, Chen Chen, and Kent D. Choquette, "Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing," Appl. Opt. 47, 4555-4559 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-25-4555

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