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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 25 — Sep. 1, 2008
  • pp: 4633–4639

Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV

Regina Soufli, Andrew L. Aquila, Farhad Salmassi, Mónica Fernández-Perea, and Eric M. Gullikson  »View Author Affiliations


Applied Optics, Vol. 47, Issue 25, pp. 4633-4639 (2008)
http://dx.doi.org/10.1364/AO.47.004633


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Abstract

This work discusses the experimental determination of the optical constants (refractive index) of DC-magnetron-sputtered boron carbide films in the 30 770 eV photon energy range. Transmittance measurements of three boron carbide films with thicknesses of 54.2, 79.0, and 112.5 nm were performed for this purpose. These are believed to be the first published experimental data for the refractive index of boron carbide films in the photon energy range above 160 eV and for the near-edge x-ray absorption fine structure regions around the boron K ( 188 eV ), carbon K ( 284.2 eV ), and oxygen K ( 543.1 eV ) absorption edges. The density, composition, surface chemistry, and morphology of the films were also investigated using Rutherford backscattering, x-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and extreme ultraviolet reflectance measurements.

© 2008 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Thin Films

History
Original Manuscript: May 22, 2008
Revised Manuscript: July 15, 2008
Manuscript Accepted: July 16, 2008
Published: August 29, 2008

Virtual Issues
Vol. 3, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Regina Soufli, Andrew L. Aquila, Farhad Salmassi, Mónica Fernández-Perea, and Eric M. Gullikson, "Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV," Appl. Opt. 47, 4633-4639 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-25-4633


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