Abstract
A straightforward approach for estimation of thickness (d), real () and imaginary parts () of the complex permittivity of very thin films from spectrophotometric measurements is presented. The uncertainties in , , and d due to methodical error and the uncertainties in the measured quantities are investigated. It is shown that the influence of these factors is considerable when , , and d are obtained simultaneously for each wavelength. The accuracy of , , and d is significantly increased if the value of d is evaluated first, its value is kept constant over the whole spectral region, and then and are calculated for each wave length.
© 2008 Optical Society of America
Full Article | PDF ArticleMore Like This
G. Vuye and T. López-Ríos
Appl. Opt. 21(16) 2968-2971 (1982)
Aleksandra B. Djurišić, Torsten Fritz, Karl Leo, and E. Herbert Li
Appl. Opt. 39(7) 1174-1182 (2000)
Ricardo Andrade, Ernesto G. Birgin, Ivan Chambouleyron, José Mario Martínez, and Sergio D. Ventura
Appl. Opt. 47(28) 5208-5220 (2008)