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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 3 — Jan. 20, 2008
  • pp: 480–485

Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts

Jiancheng Xu, Qiao Xu, and Liqun Chai  »View Author Affiliations


Applied Optics, Vol. 47, Issue 3, pp. 480-485 (2008)
http://dx.doi.org/10.1364/AO.47.000480


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Abstract

An advanced iterative algorithm is presented to extract phase distribution from randomly and spatially nonuniform phase-shifted interferograms. The proposed algorithm divides the interferograms into small blocks and retrieves local phase shifts accurately by iterations. Therefore, the phase distribution can be calculated with high precision by eliminating the effect of tilts occurring during phase shifting. Simulated results and experiments demonstrate that the proposed algorithm exhibits high precision and converges faster than previous algorithms even when the tilt errors are up to 27.6 % of the normal phase step.

© 2008 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Interferometry

History
Original Manuscript: October 1, 2007
Manuscript Accepted: November 5, 2007
Published: January 18, 2008

Citation
Jiancheng Xu, Qiao Xu, and Liqun Chai, "Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts," Appl. Opt. 47, 480-485 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-3-480


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References

  1. K. Creath, "Phase-shifting interferometry techniques," in Progress in Optics, E. Wolf, ed. (Elsevier, 1988), Vol. 26, pp. 349-393. [CrossRef]
  2. K. Creath, "Temporal phase measurement methods," in Interferogram Analysis, D. Robinson and G. Reid, eds. (IOP Publishing, 1993), pp. 95-140.
  3. K. Okada, A. Sato, and J. Tsujiuchi, "Simultaneous calculation of phase distribution and scanning phase shift in phase shifting interferometry," Opt. Commun. 84, 118-124 (1991). [CrossRef]
  4. Z. Wang and B. Han, "Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms," Opt. Lett. 29, 1671-1673 (2004). [CrossRef] [PubMed]
  5. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, "Phase shifting algorithms for nonlinear and spatially nonuniform phase shifts," J. Opt. Soc. Am. A 14, 918-930 (1997). [CrossRef]
  6. M. Chen, H. Guo, and C. Wei, "Algorithm immune to tilt phase-shifting error for phase-shifting interferometers," Appl. Opt. 39, 3894-3898 (2000). [CrossRef]
  7. A. Dobroiu, A. Apostol, V. Nascov, and V. Damian, "Tilt-compensating algorithm for phase-shift interferometry," Appl. Opt. 41, 2435-2439 (2002). [CrossRef] [PubMed]
  8. J. C. Wyant, "Inteferometric optical metrology: basic system and principles," Laser Focus 18, 65-71 (1982).

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