OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 30 — Oct. 20, 2008
  • pp: 5706–5714

Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors

Laëtitia Abel-Tibérini, Frédéric Lemarquis, and Michel Lequime  »View Author Affiliations

Applied Optics, Vol. 47, Issue 30, pp. 5706-5714 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (1452 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We propose a method for manufacturing linear variable interference filters for two-dimensional (2D) array detectors, based on the use of correcting masks combining both rotation and translation movements of the masks and substrates. The major advantage of this method is its capability to produce several identical filters in a single run. 20 mm × 20 mm samples were manufactured with a wavelength ratio almost equal to 2 along the thickness gradient direction. In agreement with calculations, the measured uniformity perpendicular to the gradient is about 99.8% along 20 mm .

© 2008 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: June 3, 2008
Revised Manuscript: August 27, 2008
Manuscript Accepted: September 15, 2008
Published: October 17, 2008

Laëtitia Abel-Tibérini, Frédéric Lemarquis, and Michel Lequime, "Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors," Appl. Opt. 47, 5706-5714 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. H. A. Macleod, “Layer uniformity and thickness monitoring,” in Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001), pp. 488-497. [CrossRef]
  2. A. Piegari, “Graded coatings,” in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 475-519.
  3. A. Piegari, M. R. Perrone, and M. L. Protopapa, “Ultraviolet-graded coatings for lasers: surface optical performance,” Thin Solid Films 373, 155-158 (2000). [CrossRef]
  4. J. P. Coates, “New microspectrometers,” Spectrosc. 15, 21-27(2000).
  5. A. Semery, “Wedge filter imaging spectrometer,” presented at the Sixth International Conference on Space Optics (ICSO 2006), Noordwijk, Nederland, 27-30 June 2006).
  6. A. Piegari and J. Bulir, “Variable narrowband transmission filters with a wide rejection band for spectrometry,” Appl. Opt. 45, 3768 (2006). [CrossRef] [PubMed]
  7. F. Villa and O. Pompa, “Emission pattern of a real vapor sources in high vacuum: an overview,” Appl. Opt. 38, 695-703 (1999). [CrossRef]
  8. Y. Yamamura and N. Itoh, “Sputtering yield,” in Ion Beam Assisted Film Growth, T. Itoh, ed., Beam Modification of Materials (Elsevier, 1989), Vol. 3, pp. 59-100.
  9. E. Vireton, P. Ganau, J. M. Mackowski, C. Michel, L. Pinard, A. Remillieux, and P. Laprat, “SiO2-Ta2O5 sputtering yields: simulated and experimental results,” Nucl. Instrum. Methods Phys. Res. B 95, 34-40 (1995). [CrossRef]
  10. L. Pekker, “Using calibration tests for adjusting target uniformity masks,” Thin Solid Films 474, 211-216(2005). [CrossRef]
  11. L. Abel-Tiberini, F. Lemarquis, and M. Lequime, “Dedicated spectrophotometer for localized transmittance and reflectance measurements,” Appl. Opt. 45, 1386-1391(2006). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited