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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 33 — Nov. 20, 2008
  • pp: 6219–6225

Closed-loop phase-shifting homodyne interferometry using heterodyne phase detection

Youichi Bitou  »View Author Affiliations

Applied Optics, Vol. 47, Issue 33, pp. 6219-6225 (2008)

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A phase-shifting homodyne interferometer with feedback control by heterodyne phase detection is developed. The backreflected beam from a reference flat with a small wedge angle and an internal heterodyne detection system are utilized to obtain heterodyne beat signals for the feedback error signal. Using a digital high-speed lock-in amplifier, interference fringe stabilization, and accurate π / 2 phase shifts when micrometer-order vibrations are applied have been successfully demonstrated with a general nonpolarizing homodyne interferometer configuration.

© 2008 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.1088) Instrumentation, measurement, and metrology : Adaptive interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 27, 2008
Revised Manuscript: October 14, 2008
Manuscript Accepted: October 14, 2008
Published: November 18, 2008

Youichi Bitou, "Closed-loop phase-shifting homodyne interferometry using heterodyne phase detection," Appl. Opt. 47, 6219-6225 (2008)

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