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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 33 — Nov. 20, 2008
  • pp: 6219–6225

Closed-loop phase-shifting homodyne interferometry using heterodyne phase detection

Youichi Bitou  »View Author Affiliations


Applied Optics, Vol. 47, Issue 33, pp. 6219-6225 (2008)
http://dx.doi.org/10.1364/AO.47.006219


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Abstract

A phase-shifting homodyne interferometer with feedback control by heterodyne phase detection is developed. The backreflected beam from a reference flat with a small wedge angle and an internal heterodyne detection system are utilized to obtain heterodyne beat signals for the feedback error signal. Using a digital high-speed lock-in amplifier, interference fringe stabilization, and accurate π / 2 phase shifts when micrometer-order vibrations are applied have been successfully demonstrated with a general nonpolarizing homodyne interferometer configuration.

© 2008 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.1088) Instrumentation, measurement, and metrology : Adaptive interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 27, 2008
Revised Manuscript: October 14, 2008
Manuscript Accepted: October 14, 2008
Published: November 18, 2008

Citation
Youichi Bitou, "Closed-loop phase-shifting homodyne interferometry using heterodyne phase detection," Appl. Opt. 47, 6219-6225 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-33-6219


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References

  1. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504-2506 (1987). [CrossRef] [PubMed]
  2. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, “Phase shifting for nonsinusoidal waveforms with phase-shift errors,” J. Opt. Soc. Am. A 12, 761-768 (1995). [CrossRef]
  3. P. de Groot and L. L. Deck, “Numerical simulations of vibration in phase-shifting interferometry,” Appl. Opt. 35, 2172-2178 (1996). [CrossRef] [PubMed]
  4. H. Kihm and S.-W. Kim, “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett. 30, 2059-2061 (2005). [CrossRef] [PubMed]
  5. R. Doloca and R. Tutsch, “Vibration induced phase-shift interferometer,” Proc. SPIE 6292, 62920Y (2006).
  6. R. Doloca, H. Broistedt, and R. Tutsch, “Phase-shift Fizeau interferometer in presence of vibration,” Proc. SPIE 7064, 706403 (2008). [CrossRef]
  7. R. Schödel, “Ultra-high accuracy thermal expansion measurements with PTB's precision interferometer,” Meas. Sci. Technol. 19, 084003 (2008). [CrossRef]
  8. Y. Ishii, J, Chen, and K. Murata, “Digital phase-measuring interferometry with a tunable laser diode,” Opt. Lett. 12, 233-235 (1987). [CrossRef] [PubMed]
  9. Y. Bitou, H. Inaba, F.-L. Hong, T. Takatsuji, and A. Onae, “Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry-Perot cavity,” Appl. Opt. 44, 5403-5407 (2005). [CrossRef] [PubMed]
  10. L. He, “Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology,” Appl. Opt. 45, 7987-7992 (2006). [CrossRef] [PubMed]
  11. X. Zhao, T. Suzuki, T. Masutomi, and O. Sasaki, “Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement,” Opt. Eng. 44, 125602 (2005). [CrossRef]
  12. R. Onodera and Y. Ishii, “Phase-shift-locked interferometer with a wavelength-modulated laser diode,” Appl. Opt. 42, 91-96 (2003). [CrossRef] [PubMed]
  13. T. Yoshino and H. Yamaguchi, “Closed-loop phase-shifting interferometry with a laser diode,” Opt. Lett. 23, 1576-1578(1998). [CrossRef]
  14. M. Yokota, A. Asaka, and T. Yoshino, “Stabilization improvements of laser diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement,” Appl. Opt. 42, 1805-1808 (2003). [CrossRef] [PubMed]
  15. Y. Bitou, “Phase-shifting interferometry with feedback control using heterodyne phase detection,” Opt. Lett. 33, 1777-1779(2008). [CrossRef] [PubMed]
  16. M. Takeda, H. Ina, and S. Kobayashi, “Fourier transform method of fringe pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160(1982). [CrossRef]

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