OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 34 — Dec. 1, 2008
  • pp: 6334–6339

Nanodisplacement measurement using spectral shifts in a white-light interferometer

Maruthi M. Brundavanam, Nirmal K. Viswanathan, and D. Narayana Rao  »View Author Affiliations

Applied Optics, Vol. 47, Issue 34, pp. 6334-6339 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (461 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We report a novel experimental method to measure nanometer displacements using wavelength shifts of spectral peaks around spectral switch or singular phase points in the interference spectra due to temporal correlation in a Michelson interferometer illuminated by a broadband white-light source. Dramatic changes in the spectral characteristics are recorded as a function of path difference between the interfering beams around the spectral switch position. These are then compared with measurements far from it in order to demonstrate the higher sensitivities involved in the proposed method.

© 2008 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(260.3160) Physical optics : Interference

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 15, 2008
Manuscript Accepted: October 10, 2008
Published: November 21, 2008

Maruthi M. Brundavanam, Nirmal K. Viswanathan, and D. Narayana Rao, "Nanodisplacement measurement using spectral shifts in a white-light interferometer," Appl. Opt. 47, 6334-6339 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. W. Wang, T. Yokozeki, R. Ishijima, A. Wada, Y. Miyamoto, M. Takeda, and S. G. Hanson, “Optical vortex metrology for nanometric speckle displacement measurement,” Opt. Express 14, 120-127 (2006). [CrossRef]
  2. H. Stoyanov, “Nanoscale linear measurements based on the attenuated total internal reflection: an interferometric approach,” Proc. SPIE 6604, 66040R (2007). [CrossRef]
  3. M. A. Choma, A. K. Ellerbee, C. Yang, T. L. Creazzo, and J. A. Izatt, “Spectral-domain phase microscopy,” Opt. Lett. 30, 1162-1164 (2005). [CrossRef]
  4. J. Lawall, “Interferometry for accurate displacement metrology,” Opt. Photon. News 15(10), 40-46 (2004). [CrossRef]
  5. P. Hariharan, Optical Interferometry, 2nd ed. (Academic, 2003).
  6. K. Nakayama, M. Tanaka, F. Shiota, and K. Kuroda, “Precision physical measurements and nanometrology,” Metrologia 28, 483-502 (1991). [CrossRef]
  7. H. J. Tiziani, “Optical methods for precision measurements,” Opt. Quantum Electron. 21, 253-282 (1989). [CrossRef]
  8. L. M. Smith and C. C. Dobson, “Absolute displacement measurements using modulation of the spectrum of the white light in a Michelson interferometer,” Appl. Opt. 28, 3339-3342(1989).
  9. U. Schnell, E. Zimmermann, and R. Dändliker, “Absolute distance measurement with synchronously sampled white light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643-651 (1995). [CrossRef]
  10. P. Sandoz, G. Tribillon, and H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferogram,” J. Mod. Opt. 43, 701-708 (1996).
  11. I. Verrier, G. Brun, and J. P. Goure, “SISAM interferometer for distance measurements,” Appl. Opt. 36, 6225-6230(1997). [CrossRef]
  12. P. Hlubina, “Dispersive white-light spectral interferometry to measure distances and displacements,” Opt. Commun. 212, 65-70 (2002). [CrossRef]
  13. S. Costantino, O. E. Martinez, and J. R. Torga, “Wide band interferometry for thickness measurement,” Opt. Express. 11, 952-957 (2003).
  14. H. Chen, T. Liu, and Z. Meng, “Nanometrology based on white-light spectral interferometry in thickness measurement,” Proc. SPIE 6831, 683108 (2007).
  15. V. N. Kumar and D. N. Rao, “Using interference in the frequency domain for precise determination of thickness and refractive index of normal dispersive materials,” J. Opt. Soc. Am. B 12, 1559-1563 (1995). [CrossRef]
  16. M. M. Brundavanam, N. K. Viswanathan, and D. N. Rao, “Spectral anomalies due to temporal correlation in a white light interferometer,” Opt. Lett. 32, 2279-2281 (2007). [CrossRef]
  17. P. Hlubina, “Experimental demonstration of the spectral interference between two beams of a low-coherence source at the output of a Michelson interferometer,” J. Mod. Opt. 44, 1049-1059 (1997). [CrossRef]
  18. V. N. Kumar, “Spectral interferometry: a study of the degree of coherence in the space-frequency domain and the applications,” Ph.D. thesis (University of Hyderabad, 1997).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited