OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 35 — Dec. 10, 2008
  • pp: 6638–6643

Three-port beam splitter of a binary fused-silica grating

Jijun Feng, Changhe Zhou, Bo Wang, Jiangjun Zheng, Wei Jia, Hongchao Cao, and Peng Lv  »View Author Affiliations

Applied Optics, Vol. 47, Issue 35, pp. 6638-6643 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (644 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A deep-etched polarization-independent binary fused-silica phase grating as a three-port beam splitter is designed and manufactured. The grating profile is optimized by use of the rigorous coupled-wave analysis around the 785 nm wavelength. The physical explanation of the grating is illustrated by the modal method. Simple analytical expressions of the diffraction efficiencies and modal guidelines for the three-port beam splitter grating design are given. Holographic recording technology and inductively coupled plasma etching are used to manufacture the fused-silica grating. Experimental results are in good agreement with the theoretical values.

© 2008 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.1360) Optical devices : Beam splitters

ToC Category:
Diffraction and Gratings

Original Manuscript: July 9, 2008
Revised Manuscript: September 18, 2008
Manuscript Accepted: October 30, 2008
Published: December 8, 2008

Jijun Feng, Changhe Zhou, Bo Wang, Jiangjun Zheng, Wei Jia, Hongchao Cao, and Peng Lv, "Three-port beam splitter of a binary fused-silica grating," Appl. Opt. 47, 6638-6643 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. R. Schnabel, A. Bunkowski, O. Burmeister, and K. Danzmann, “Three-port beam splitters-combiners for interferometer applications,” Opt. Lett. 31, 658-660 (2006). [CrossRef] [PubMed]
  2. Y. J. Liu and X. W. Sun, “Electrically tunable two-dimensional holographic photonic crystal fabricated by a single diffractive element,” Appl. Phys. Lett. 89, 171101 (2006). , [CrossRef]
  3. Y. Lin, D. Rivera, and K. P. Chen, “Woodpile-type photonic crystals with orthorhombic or tetragonal symmetry formed through phase mask techniques,” Opt. Express 14, 887-892(2006). [CrossRef] [PubMed]
  4. C. Zhou and L. Liu, “Numerical study of Dammann array illuminators,” Appl. Opt. 34, 5961-5969 (1995). [CrossRef] [PubMed]
  5. http://www.optometrics.com.
  6. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068-1076 (1995). [CrossRef]
  7. P. Lalanne and G. M. Morris, “Highly improved convergence of the coupled-wave method for TM polarization,” J. Opt. Soc. Am. A 13, 779-784 (1996). [CrossRef]
  8. I. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewartha, “The dielectric lamellar diffraction grating,” Opt. Acta 28, 413-428 (1981). [CrossRef]
  9. A. V. Tishchenko, “Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method,” Opt. Quantum Electron. 37, 309-330 (2005). [CrossRef]
  10. T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tünnermann, A. Tishchenko, and O. Parriaux, “Investigation of the polarization-dependent diffraction of deep dielectric rectangular transmission gratings illuminated in Littrow mounting,” Appl. Opt. 46, 819-826 (2007). [CrossRef] [PubMed]
  11. J. Feng, C. Zhou, J. Zheng, and B. Wang, “Modal analysis of deep-etched low-contrast two-port beam splitter grating,” Opt. Commun. 281, 5298-5301 (2008). [CrossRef]
  12. E. Gamet, A. V. Tishchenko, and O. Parriaux, “Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating,” Appl. Opt. 46, 6719-6726(2007). [CrossRef] [PubMed]
  13. J. Zheng, C. Zhou, B. Wang, and J. Feng, “Beam Splitting of low-contrast binary gratings under second Bragg angle incidence,” J. Opt. Soc. Am. A 25, 1075-1083 (2008). [CrossRef]
  14. J. Zheng, C. Zhou, J. Feng, and B. Wang, “Polarizing beam splitter of deep-etched triangular-groove fused-silica gratings,” Opt. Lett. 33, 1554-1556 (2008). [CrossRef] [PubMed]
  15. S. Wang, C. Zhou, H. Ru, and Y. Zhang, “Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology,” Appl. Opt. 44, 4429-4434(2005). [CrossRef] [PubMed]
  16. S. Wang, C. Zhou, Y. Zhang, and H. Ru, “Deep-etched high-density fused-silica transmission gratings with high efficiency at a wavelength of 1550 nm,” Appl. Opt. 45, 2567-2571 (2006). [CrossRef] [PubMed]
  17. B. Wang, C. Zhou, S. Wang, and J. Feng, “Polarizing beam splitter of a deep-etched fused-silica grating,” Opt. Lett. 32, 1299-1301 (2007). [CrossRef] [PubMed]
  18. B. Wang, C. Zhou, J. Feng, H. Ru, and J. Zheng, “Wideband two-port beam splitter of a binary fused-silica phase grating,” Appl. Opt. 47, 4004-4008 (2008). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited