Abstract

A simple and effective technique for the simultaneous measurement of the refractive index and the thickness of thin films is proposed. The method is based on the spectral dependence of the visibility of interference fringes that result from thin-film interference when the film is illuminated with a white light. The film is on the special substrate, and an optical contact is provided between them. The measurement consists of finding the local change of the fringes' visibility in the observed channeled spectrum expressed as the seaming change of the fringes' periodicity. The method can be applied for real time optical inspection during the manufacturing of thin polymer films.

© 2008 Optical Society of America

Measurement of the thickness and refractive index of a thin film by analyzing reflected interference fringes

Deok Woo Kim, Minjae Kwon, Soobong Park, Byoung Joo Kim, and Myoungsik Cha
Appl. Opt. 62(30) 8018-8024 (2023)

Thickness dependent CARS measurement of polymeric thin films without depth-profiling

Dae Sik Choi, Sae Chae Jeoung, and Byung-Hyuk Chon
Opt. Express 16(4) 2604-2613 (2008)

Refractive index and extinction coefficient determination of an absorbing thin film by using the continuous wavelet transform method

Emre Coşkun, Kıvanç Sel, Serhat Özder, and Mustafa Kurt
Appl. Opt. 47(27) 4888-4894 (2008)

Determination of fringe order in the channel spectra of thin films

Albert Feldman
Appl. Opt. 23(8) 1193-1196 (1984)

Application of white-light scanning interferometer on transparent thin-film measurement

Meng-Chi Li, Der-Shen Wan, and Cheng-Chung Lee
Appl. Opt. 51(36) 8579-8586 (2012)