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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 7 — Mar. 1, 2008
  • pp: 888–893

Vibration compensating beam scanning interferometer for surface measurement

Haydn Martin, Kaiwei Wang, and Xiangqian Jiang  »View Author Affiliations


Applied Optics, Vol. 47, Issue 7, pp. 888-893 (2008)
http://dx.doi.org/10.1364/AO.47.000888


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Abstract

Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.

© 2008 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(250.0250) Optoelectronics : Optoelectronics

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 12, 2007
Manuscript Accepted: December 18, 2007
Published: February 28, 2008

Citation
Haydn Martin, Kaiwei Wang, and Xiangqian Jiang, "Vibration compensating beam scanning interferometer for surface measurement," Appl. Opt. 47, 888-893 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-7-888

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