Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator
Applied Optics, Vol. 48, Issue 10, pp. 1797-1803 (2009)
http://dx.doi.org/10.1364/AO.48.001797
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Abstract
We present in-depth discussion of the design and optimization of a nanomechanical sensor using a silicon cantilever comprising a two-dimensional photonic crystal (PC) nanocavity resonator arranged in a U-shaped silicon PC waveguide. For example, the minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0133%,
© 2009 Optical Society of America
OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(140.3945) Lasers and laser optics : Microcavities
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(230.4685) Optical devices : Optical microelectromechanical devices
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(130.5296) Integrated optics : Photonic crystal waveguides
ToC Category:
Sensors
History
Original Manuscript: November 11, 2008
Manuscript Accepted: January 30, 2009
Published: March 23, 2009
Citation
Chengkuo Lee and Jayaraj Thillaigovindan, "Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator," Appl. Opt. 48, 1797-1803 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-10-1797
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