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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 10 — Apr. 1, 2009
  • pp: 1797–1803

Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator

Chengkuo Lee and Jayaraj Thillaigovindan  »View Author Affiliations


Applied Optics, Vol. 48, Issue 10, pp. 1797-1803 (2009)
http://dx.doi.org/10.1364/AO.48.001797


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Abstract

We present in-depth discussion of the design and optimization of a nanomechanical sensor using a silicon cantilever comprising a two-dimensional photonic crystal (PC) nanocavity resonator arranged in a U-shaped silicon PC waveguide. For example, the minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0133%, 0.37 μm , and 0.0625 μN , respectively, for a 30 μm long and 15 μm wide cantilever. In the graph of strain versus resonant wavelength shift, a rather linear relationship is observed for various data derived from different cantilevers. Both the resonant wavelength and the resonant wavelength shift of cantilevers under deformation or force loads are mainly a function of defect length change. Results point out that all these mechanical parameters are mainly dependent on the defect length of the PC nanocavity resonator. This new PC cantilever sensor shows promising linear characteristics as an optical nanomechanical sensor.

© 2009 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(140.3945) Lasers and laser optics : Microcavities
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(230.4685) Optical devices : Optical microelectromechanical devices
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(130.5296) Integrated optics : Photonic crystal waveguides

ToC Category:
Sensors

History
Original Manuscript: November 11, 2008
Manuscript Accepted: January 30, 2009
Published: March 23, 2009

Citation
Chengkuo Lee and Jayaraj Thillaigovindan, "Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator," Appl. Opt. 48, 1797-1803 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-10-1797


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