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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 12 — Apr. 20, 2009
  • pp: 2315–2320

Indirect broadband optical monitoring with multiple witness substrates

Valery G. Zhupanov, Evgeny V. Klyuev, Sergey V. Alekseev, Ivan V. Kozlov, Michael K. Trubetskov, Michael A. Kokarev, and Alexander V. Tikhonravov  »View Author Affiliations


Applied Optics, Vol. 48, Issue 12, pp. 2315-2320 (2009)
http://dx.doi.org/10.1364/AO.48.002315


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Abstract

We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the ability to reliably control thin dielectric and metal layers. Considered examples demonstrate a good accuracy of the proposed approach.

© 2009 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

History
Original Manuscript: February 4, 2009
Manuscript Accepted: March 21, 2009
Published: April 14, 2009

Citation
Valery G. Zhupanov, Evgeny V. Klyuev, Sergey V. Alekseev, Ivan V. Kozlov, Michael K. Trubetskov, Michael A. Kokarev, and Alexander V. Tikhonravov, "Indirect broadband optical monitoring with multiple witness substrates," Appl. Opt. 48, 2315-2320 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-12-2315

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