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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 12 — Apr. 20, 2009
  • pp: 2315–2320

Indirect broadband optical monitoring with multiple witness substrates

Valery G. Zhupanov, Evgeny V. Klyuev, Sergey V. Alekseev, Ivan V. Kozlov, Michael K. Trubetskov, Michael A. Kokarev, and Alexander V. Tikhonravov  »View Author Affiliations


Applied Optics, Vol. 48, Issue 12, pp. 2315-2320 (2009)
http://dx.doi.org/10.1364/AO.48.002315


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Abstract

We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the ability to reliably control thin dielectric and metal layers. Considered examples demonstrate a good accuracy of the proposed approach.

© 2009 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

History
Original Manuscript: February 4, 2009
Manuscript Accepted: March 21, 2009
Published: April 14, 2009

Citation
Valery G. Zhupanov, Evgeny V. Klyuev, Sergey V. Alekseev, Ivan V. Kozlov, Michael K. Trubetskov, Michael A. Kokarev, and Alexander V. Tikhonravov, "Indirect broadband optical monitoring with multiple witness substrates," Appl. Opt. 48, 2315-2320 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-12-2315


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References

  1. B. Vidal, A. Fornier, and E. Pelletier, “Optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 17, 1038-1047 (1978). [CrossRef] [PubMed]
  2. B. Vidal, A. Fornier, and E. Pelletier, “Wideband optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 18, 3851-3856 (1979). [PubMed]
  3. B. Vidal and E. Pelletier, “Nonquarterwave multilayer filters: optical monitoring with a minicomputer allowing correction of thickness errors,” Appl. Opt. 18, 3857-3862 (1979). [PubMed]
  4. X.-Q. Hu, Y.-M. Chen, and J.-F. Tang, “Apparatus for wideband monitoring of optical coatings and its uses,” Appl. Opt. 28, 2886-2888 (1989). [CrossRef] [PubMed]
  5. L. Li and Y. Yen, “Wideband monitoring and measuring system for optical coatings,” Appl. Opt. 28, 2889-2894 (1989). [CrossRef] [PubMed]
  6. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. I. Theoretical description,” Appl. Opt. 31, 3821-3835 (1992). [CrossRef] [PubMed]
  7. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results--sputtering system,” Appl. Opt. 32, 2351-2360 (1993). [CrossRef] [PubMed]
  8. G. Emiliani, A. Piegari, and E. Masetti, “Fast scan spectrometer for monitoring of thin film optical properties,” Proc. SPIE 1012, 35-46 (1988).
  9. H. H. Bauer and E. Nuessler, “In situ optical multichannel spectrometer system,” Proc. SPIE 2253, 423-431 (1994). [CrossRef]
  10. M. Tilsch, V. Scheuer, J. Staub, and T. Tschudi, “Direct optical monitoring instrument with a double detection system for the control of multilayer systems from the visible to the near infrared,” Proc. SPIE 2253, 414-422 (1994). [CrossRef]
  11. B. Sullivan, G. Clarke, T. Akiyama, N. Osborne, M. Ranger, J. A. Dobrowolski, L. Howe, A. Matsumoto, Y. Song, and K. Kikuchi, “High-rate automated deposition system for the manufacture of complex multilayer coatings,” Appl. Opt. 39, 157-167 (2000). [CrossRef]
  12. S. Wilbrandt, R. Leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In-situ broadband monitoring and characterization of optical coatings,” in Optical Interference Coatings on CD-ROM, OSA Technical Digest Series (Optical Society of America, 2004), paper TuE6.
  13. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495-1501 (2006). [CrossRef] [PubMed]
  14. M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering,” Appl. Opt. 45, 1502-1506 (2006). [CrossRef] [PubMed]
  15. B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “An error compensation strategy for broadband optical monitoring,” in Optical Interference Coatings (Optical Society of America, 2007), paper WC5.
  16. C. Grèzes-Besset, N. Valette, H. Krol, D. Torricini, F. Chazallet, J. Poupard, L. Gallais, J.-Y. Natoli, and M. Commandré, “Multi-wavelength optical monitoring for infrared complex functions: application to process improvement,” in Optical Interference Coatings (Optical Society of America, 2007), paper WC9.
  17. B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin-film filter manufacturing,” Appl. Opt. 46, 4294-4303 (2007). [CrossRef] [PubMed]
  18. S. Wilbrandt, N. Kaiser, and O. Stenzel, “In-situ broadband monitoring of heterogeneous optical coatings,” Thin Solid Films 502, 153-157 (2006). [CrossRef]
  19. S. Wilbrandt, O. Stenzel, N. Kaiser, M. K. Trubetskov, and A. V. Tikhonravov, “Online re-engineering of interference coatings,” in Optical Interference Coatings (Optical Society of America, 2007), paper WC10.
  20. H. Macleod, “Monitoring of optical coatings,” Appl. Opt. 20, 82-89 (1981). [CrossRef] [PubMed]
  21. R. R. Willey, “Optical thickness monitoring sensitivity improvement using graphical methods,” Appl. Opt. 26, 729-737 (1987). [CrossRef] [PubMed]
  22. H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics, 2001). [CrossRef]
  23. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring,” Appl. Opt. 45, 7026-7034 (2006). [CrossRef] [PubMed]
  24. SOLAR Laser Systems, http://www.solarlaser.com.
  25. A. Tikhonravov, M. Trubetskov, and G. DeBell, “On the accuracy of optical thin film parameter determination based on spectrophotometric data,” Proc. SPIE 5188, 190-199 (2003). [CrossRef]
  26. J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 topical meeting on optical interference coatings: manufacturing problem,” Appl. Opt. 47, C231-C245 (2008). [CrossRef] [PubMed]
  27. P. B. Johnson and R. W. Christy, “Optical constants of transition metals: Ti, V, Cr, Mn, Fe, Co, Ni, and Pd,” Phys. Rev. B 9, 5056-5070 (1974). [CrossRef]

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