To determine the absolute flatness deviations of optical surfaces, a novel method using two optical plates to achieve the absolute flatness test is presented. Absolute deviations of three surfaces, the rear surface of plate I and the front and rear surfaces of plate II, are obtained by four measurements. Wavefront error due to the inhomogeneity of plate II is measured beforehand and is then subtracted from the test results. Vertical profiles of the three surfaces are compared with the measurement results obtained by Zygo’s three-flat application. Good agreement validates our method. The advantage of our method is that only one transmission flat is needed during the absolute test, which is especially useful for large-aperture interferometer calibration.
© 2009 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: January 5, 2009
Revised Manuscript: April 12, 2009
Manuscript Accepted: April 13, 2009
Published: April 27, 2009
Chen Xu, Lei Chen, and Jiayi Yin, "Method for absolute flatness measurement of optical surfaces," Appl. Opt. 48, 2536-2541 (2009)