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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 13 — May. 1, 2009
  • pp: 2566–2573

Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

Shinn-Fwu Wang, Ming-Hung Chiu, Wei-Wu Chen, Fu-Hsi Kao, and Rong-Seng Chang  »View Author Affiliations


Applied Optics, Vol. 48, Issue 13, pp. 2566-2573 (2009)
http://dx.doi.org/10.1364/AO.48.002566


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Abstract

A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0.417 nm . The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Interferometry

History
Original Manuscript: January 21, 2009
Revised Manuscript: April 5, 2009
Manuscript Accepted: April 15, 2009
Published: April 29, 2009

Citation
Shinn-Fwu Wang, Ming-Hung Chiu, Wei-Wu Chen, Fu-Hsi Kao, and Rong-Seng Chang, "Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry," Appl. Opt. 48, 2566-2573 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-13-2566


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References

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