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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 14 — May. 10, 2009
  • pp: 2767–2777

Five-degrees-of-freedom diffractive laser encoder

Chien-Hung Liu, Hsueh-Liang Huang, and Hau-Wei Lee  »View Author Affiliations

Applied Optics, Vol. 48, Issue 14, pp. 2767-2777 (2009)

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Linear laser encoders have been widely used for precision positioning control of a linear stage. We develop a five-degrees-of-freedom (5-DOF) laser linear encoder to simultaneously measure the position, straightness, pitch, roll, and yaw errors along one moving axis. This study integrates the circular polarized interferometric technique with the three-dimensional diffracted ray-tracing method to develop a novel laser encoder with 5-DOF. The phases encoded within the + 1 and 1 order diffraction lights reflected from the diffraction grating are decoded by the circular polarized interferometric technique to measure the linear displacement when the diffraction grating moves. The three-dimensional diffracted ray tracing of the + 1 - and 1 -order diffraction lights induced by the motion errors of the moved grating were analyzed to calculate the other motion errors based on the detection of light spots on two quadrant photodiode detectors. The period of the grating is 0.83 μm and the experimental results show that the measurement accuracy was better than ± 0.3 μm / ± 41 μm for straightness, ± 1 arc sec / ± 215 arc sec for angular error components, and ± 160 nm / 2 mm for linear displacement.

© 2009 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 5, 2008
Revised Manuscript: April 16, 2009
Manuscript Accepted: April 17, 2009
Published: May 7, 2009

Chien-Hung Liu, Hsueh-Liang Huang, and Hau-Wei Lee, "Five-degrees-of-freedom diffractive laser encoder," Appl. Opt. 48, 2767-2777 (2009)

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