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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 15 — May. 20, 2009
  • pp: 2853–2859

Simultaneous characterization of detector and source imperfections in infrared ellipsometry

Herbert Wormeester, Pepijn R. Kole, and Bene Poelsema  »View Author Affiliations


Applied Optics, Vol. 48, Issue 15, pp. 2853-2859 (2009)
http://dx.doi.org/10.1364/AO.48.002853


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Abstract

Optical components required for infrared (IR) ellipsometry have distinctly worse characteristics compared to those available for the visible spectrum. The calibration of the optical components used is therefore essential for obtaining reliable results. Here a powerful method is outlined to calibrate simultaneously the polarization characteristics of a source and detector through the synchronous rotation of two polarizers. The performance of this method is to a large degree independent of the quality of (commercially available) polarizers. This renders this method robust and highly suitable for the IR range. Moreover, it is also inherently insensitive toward a nonlinear response of the detector. This enables us to use this method as the first step in the quantification of component imperfections.

© 2009 Optical Society of America

OCIS Codes
(240.6490) Optics at surfaces : Spectroscopy, surface
(300.6340) Spectroscopy : Spectroscopy, infrared
(240.2130) Optics at surfaces : Ellipsometry and polarimetry

ToC Category:
Ellipsometry and Polarimetry

History
Original Manuscript: November 17, 2008
Revised Manuscript: April 6, 2009
Manuscript Accepted: April 19, 2009
Published: May 12, 2009

Citation
Herbert Wormeester, Pepijn R. Kole, and Bene Poelsema, "Simultaneous characterization of detector and source imperfections in infrared ellipsometry," Appl. Opt. 48, 2853-2859 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-15-2853


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References

  1. E. Wold and J. Bremer, “Mueller matrix analysis of infrared ellipsometry,” Appl. Opt. 33, 5982-5993 (1994). [CrossRef] [PubMed]
  2. J. H. W. G. den Boer, G. W. M. Kroesen, M. Haverlag, and F. J. de Hoog, “Spectroscopic IR ellipsometry with imperfect components,” Thin Solid Films 234, 323-326 (1993). [CrossRef]
  3. M. Luttmann, J.-L. Stehle, C. Defranoux, and J.-P. Piel, “High accuracy IR ellipsometry working with a Ge Brewster angle reflection polarizer and grid analyzer,” Thin Solid Films 313-314, 631-641 (1998). [CrossRef]
  4. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1979).
  5. J. H. W. G. den Boer, “Spectroscopic infrared ellipsometry: components, calibration, and application,” Ph.D. dissertation (University of Eindhoven, 1995).
  6. B. Johs and C. M. Herzinger, “Quantifying the accuracy of ellipsometer systems,” Phys. Status Solidi C 5, 1031-1035(2008). [CrossRef]

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