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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 18 — Jun. 20, 2009
  • pp: 3497–3508

Interpolated local model fitting method for accurate and fast single-shot surface profiling

Tatsuya Yokota, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki  »View Author Affiliations

Applied Optics, Vol. 48, Issue 18, pp. 3497-3508 (2009)

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The local model fitting (LMF) method is a useful single-shot surface profiling algorithm based on spatial carrier frequency fringe patterns. The measurement principle of the LMF method relies on the assumption that the target surface is locally flat. In this paper, we first analyze the measurement error of the LMF method caused by violation of the locally flat assumption. More specifically, we theoretically prove that the measurement error is zero at fringe intensity extrema in an interference pattern even when the locally flat assumption is violated. Based on this theoretical finding, we propose a new surface profiling method called the interpolated LMF (iLMF) algorithm, which is more accurate and computationally efficient than the original LMF method. The practical usefulness of the iLMF method is shown through experiments.

© 2009 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 9, 2009
Manuscript Accepted: May 28, 2009
Published: June 15, 2009

Tatsuya Yokota, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki, "Interpolated local model fitting method for accurate and fast single-shot surface profiling," Appl. Opt. 48, 3497-3508 (2009)

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