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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 19 — Jul. 1, 2009
  • pp: 3760–3765

Masking technique for coating thickness control on large and strongly curved aspherical optics

B. Sassolas, R. Flaminio, J. Franc, C. Michel, J.-L. Montorio, N. Morgado, and L. Pinard  »View Author Affiliations

Applied Optics, Vol. 48, Issue 19, pp. 3760-3765 (2009)

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We discuss a method to control the coating thickness deposited onto large and strongly curved optics by ion beam sputtering. The technique uses an original design of the mask used to screen part of the sputtered materials. A first multielement mask is calculated from the measured two-dimensional coating thickness distribution. Then, by means of an iterative process, the final mask is designed. By using such a technique, it has been possible to deposit layers of tantalum pentoxide having a high thickness gradient onto a curved substrate 500 mm in diameter. Residual errors in the coating thickness profile are below 0.7%.

© 2009 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

ToC Category:
Optical Design and Fabrication

Original Manuscript: February 12, 2009
Revised Manuscript: May 29, 2009
Manuscript Accepted: May 29, 2009
Published: June 24, 2009

B. Sassolas, R. Flaminio, J. Franc, C. Michel, J.-L. Montorio, N. Morgado, and L. Pinard, "Masking technique for coating thickness control on large and strongly curved aspherical optics," Appl. Opt. 48, 3760-3765 (2009)

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