OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 19 — Jul. 1, 2009
  • pp: 3830–3838

Shaped silicon wafers obtained by hot plastic deformation: performance evaluation for future astronomical x-ray telescopes

Yuichiro Ezoe, Takayuki Shirata, Ikuyuki Mitsuishi, Manabu Ishida, Kazuhisa Mitsuda, Kohei Morishita, and Kazuo Nakajima  »View Author Affiliations


Applied Optics, Vol. 48, Issue 19, pp. 3830-3838 (2009)
http://dx.doi.org/10.1364/AO.48.003830


View Full Text Article

Enhanced HTML    Acrobat PDF (1543 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In order to develop lightweight and high angular resolution x-ray mirrors, we have investigated hot plastic deformation of 4 in. silicon (111) wafers. A sample wafer was deformed using hemispherical dies with a curvature radius of 1000 mm . The measured radius of the deformed wafer was 1030 mm , suggesting that further conditioning is indispensable for better shaping. For the first time to our knowledge, x-ray reflection on a deformed wafer was detected at Al K α 1.49 keV . An estimated surface roughness of < 1 nm from the x-ray reflection profile was comparable to that of a bare silicon wafer without deformation. Hence, no significant degradation of the microroughness was seen.

© 2009 Optical Society of America

OCIS Codes
(170.3890) Medical optics and biotechnology : Medical optics instrumentation
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Thin Films

History
Original Manuscript: April 28, 2009
Manuscript Accepted: May 26, 2009
Published: June 26, 2009

Citation
Yuichiro Ezoe, Takayuki Shirata, Ikuyuki Mitsuishi, Manabu Ishida, Kazuhisa Mitsuda, Kohei Morishita, and Kazuo Nakajima, "Shaped silicon wafers obtained by hot plastic deformation: performance evaluation for future astronomical x-ray telescopes," Appl. Opt. 48, 3830-3838 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-19-3830

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited