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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 19 — Jul. 1, 2009
  • pp: 3830–3838

Shaped silicon wafers obtained by hot plastic deformation: performance evaluation for future astronomical x-ray telescopes

Yuichiro Ezoe, Takayuki Shirata, Ikuyuki Mitsuishi, Manabu Ishida, Kazuhisa Mitsuda, Kohei Morishita, and Kazuo Nakajima  »View Author Affiliations


Applied Optics, Vol. 48, Issue 19, pp. 3830-3838 (2009)
http://dx.doi.org/10.1364/AO.48.003830


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Abstract

In order to develop lightweight and high angular resolution x-ray mirrors, we have investigated hot plastic deformation of 4 in. silicon (111) wafers. A sample wafer was deformed using hemispherical dies with a curvature radius of 1000 mm . The measured radius of the deformed wafer was 1030 mm , suggesting that further conditioning is indispensable for better shaping. For the first time to our knowledge, x-ray reflection on a deformed wafer was detected at Al K α 1.49 keV . An estimated surface roughness of < 1 nm from the x-ray reflection profile was comparable to that of a bare silicon wafer without deformation. Hence, no significant degradation of the microroughness was seen.

© 2009 Optical Society of America

OCIS Codes
(170.3890) Medical optics and biotechnology : Medical optics instrumentation
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Thin Films

History
Original Manuscript: April 28, 2009
Manuscript Accepted: May 26, 2009
Published: June 26, 2009

Citation
Yuichiro Ezoe, Takayuki Shirata, Ikuyuki Mitsuishi, Manabu Ishida, Kazuhisa Mitsuda, Kohei Morishita, and Kazuo Nakajima, "Shaped silicon wafers obtained by hot plastic deformation: performance evaluation for future astronomical x-ray telescopes," Appl. Opt. 48, 3830-3838 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-19-3830


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References

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