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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 2 — Jan. 10, 2009
  • pp: 316–320

Transmittance enhancement of a wire-grid polarizer by antireflection coating

Itsunari Yamada, Kenji Kintaka, Junji Nishii, Satoshi Akioka, Yutaka Yamagishi, and Mitsunori Saito  »View Author Affiliations

Applied Optics, Vol. 48, Issue 2, pp. 316-320 (2009)

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We examined the effect of an antireflection (AR) coating to enhance the TM transmittance of the wire-grid polarizer. The polarization transmission spectra were calculated using the rigorous coupled-wave analysis. As a result, we verified that an AR film should be inserted between a wire-grid and a Si substrate as regards the TM transmittance and the polarization function. Based on the simulation results, we fabricated a tungsten silicide (WSi) wire-grid polarizer with SiO films on both sides of the Si substrate. The transmittance exceeded 80% at a 4 5 μm wavelength range, although the theoretical transmittance of Si substrate is 54% and the ratio of the TM and TE transmittances reached 24 dB at a 3 μm wavelength when the WSi grating has a 300 nm thickness, a 400 nm period, and a fill factor of 0.6. Wire-grid polarizers with higher transmittance and larger extinction ratio can be obtained by adjusting the AR film thickness, the fill factor, and the thickness of the WSi grating.

© 2009 Optical Society of America

OCIS Codes
(230.5440) Optical devices : Polarization-selective devices
(310.1210) Thin films : Antireflection coatings
(310.5448) Thin films : Polarization, other optical properties
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Thin Films

Original Manuscript: September 16, 2008
Revised Manuscript: November 19, 2008
Manuscript Accepted: November 20, 2008
Published: January 7, 2009

Itsunari Yamada, Kenji Kintaka, Junji Nishii, Satoshi Akioka, Yutaka Yamagishi, and Mitsunori Saito, "Transmittance enhancement of a wire-grid polarizer by antireflection coating," Appl. Opt. 48, 316-320 (2009)

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