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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 20 — Jul. 10, 2009
  • pp: 3930–3937

Dwell time algorithm in ion beam figuring

Jian Fen Wu, Zhen Wu Lu, Hong Xin Zhang, and Tai Sheng Wang  »View Author Affiliations

Applied Optics, Vol. 48, Issue 20, pp. 3930-3937 (2009)

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To get a high-precision optical surface, the deconvolved process of dwell time was transferred to a matrix equation in which the damped factor and the extra removal amount were introduced to expand the freedom of solution. A path weight factor and a surface error weight factor were used to take the scanning path and the initial surface error into account. Combined with the Gerchberg bandlimited extrapolation algorithm for initial surface error map extension, a high-precision final surface could be obtained within a factual aperture. Two surface error maps were calculated to rms = 0.1 nm from rms = 130.23 nm and to rms = 0.08 nm from rms = 282.74 nm . The simulations show that a perfect dwell time solution could be obtained by the revised matrix equation and initial surface error map extension with the help of the least squares QR (LSQR) algorithm.

© 2009 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 19, 2009
Revised Manuscript: June 12, 2009
Manuscript Accepted: June 15, 2009
Published: July 2, 2009

Jian Fen Wu, Zhen Wu Lu, Hong Xin Zhang, and Tai Sheng Wang, "Dwell time algorithm in ion beam figuring," Appl. Opt. 48, 3930-3937 (2009)

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