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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 20 — Jul. 10, 2009
  • pp: 3930–3937

Dwell time algorithm in ion beam figuring

Jian Fen Wu, Zhen Wu Lu, Hong Xin Zhang, and Tai Sheng Wang  »View Author Affiliations


Applied Optics, Vol. 48, Issue 20, pp. 3930-3937 (2009)
http://dx.doi.org/10.1364/AO.48.003930


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Abstract

To get a high-precision optical surface, the deconvolved process of dwell time was transferred to a matrix equation in which the damped factor and the extra removal amount were introduced to expand the freedom of solution. A path weight factor and a surface error weight factor were used to take the scanning path and the initial surface error into account. Combined with the Gerchberg bandlimited extrapolation algorithm for initial surface error map extension, a high-precision final surface could be obtained within a factual aperture. Two surface error maps were calculated to rms = 0.1 nm from rms = 130.23 nm and to rms = 0.08 nm from rms = 282.74 nm . The simulations show that a perfect dwell time solution could be obtained by the revised matrix equation and initial surface error map extension with the help of the least squares QR (LSQR) algorithm.

© 2009 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: March 19, 2009
Revised Manuscript: June 12, 2009
Manuscript Accepted: June 15, 2009
Published: July 2, 2009

Citation
Jian Fen Wu, Zhen Wu Lu, Hong Xin Zhang, and Tai Sheng Wang, "Dwell time algorithm in ion beam figuring," Appl. Opt. 48, 3930-3937 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-20-3930


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References

  1. N. A. Lynn, E. K. Robert, and S. L. Timothy, “Surface error correction of a Keck 10 m telescope primary mirror segment by ion figuring,” Proc. SPIE 1531, 195-204 (1991).
  2. P. M. Shanbhag, M. R. Feinberg, G. Sandri, M. N. Horenstein, and T. G. Bifano, “Ion-beam machining of millimeter scale optics,” Appl. Opt. 39, 599-611 (2000). [CrossRef]
  3. L. Aschke, F. Schubert, J. Kegeler, and A. Schindler, “Flatness correction of NZTE mask blank substrates,” Proc. SPIE 4343, 646-653 (2001). [CrossRef]
  4. M. Ghigo, P. Conconia, M. Sala, E. Antonello, G. Pareschi, and L. Poletto, “Field corrector for the Ultraviolet Italian Sky Surveyor on the International Space Station (UVISS): ion beam figuring and application of the multilayer filters,” Proc. SPIE 5488, 457-480 (2004).
  5. T. Hänsel, A. Nickel, and A. Schindler, “Ion beam figuring of strongly curved surfaces with an (x,y,z) linear three-axis system,” in Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWD6.
  6. S. R. Wilson and J. R. McNeil, “Neutral ion beam figuring of large optical surfaces,” Proc. SPIE 818, 320-322 (1987).
  7. S. R. Wilson, D. W. Reicher, C. F. Kranenberg, and J. R. McNeil, “Ion beam milling of fused silica for windows fabrication,” Proc. SPIE 1441, 82-85 (1990). [CrossRef]
  8. A. Schindler, T. Hänsel, F. Frost, R. Fechner, and G. Seidenkranz, “Ion beam finishing technology for high precision optics production,” in Optical Fabrication and Testing, A.Sawchuk, ed., Vol. 76 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2002), paper OTuB5.
  9. H. Fang, P. Guo, and J. Yu, “Dwell function algorithm in fluid jet polishing,” Appl. Opt. 45, 4291-4296 (2006). [CrossRef] [PubMed]
  10. C. L. Charles, C. M. Egert, and K. W. Hyltonet, “Advanced matrix-based algorithm for ion beam milling of optical components,” Proc. SPIE 1752, 54-62 (1992). [CrossRef]
  11. C. Paige and M. A. Saunders, “LSQR: an algorithm for sparse linear equations and sparse least squares,” ACM Trans. Math. Software 8, 43-71 (1982). [CrossRef]
  12. J. Robert and Marks, “Gerchberg's extrapolation algorithm in two dimensions,” Appl. Opt. 20, 1815-1820 (1981). [CrossRef]

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