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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 20 — Jul. 10, 2009
  • pp: 3948–3960

Suppressing phase errors from vibration in phase-shifting interferometry

Leslie L. Deck  »View Author Affiliations

Applied Optics, Vol. 48, Issue 20, pp. 3948-3960 (2009)

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A general method for reducing the influence of vibrations in phase-shifting interferometry corrects the surface phase map through a spectral analysis of a “phase-error pattern,” a plot of the interference intensity versus the measured phase, for each phase-shifted image. The method is computationally fast, applicable to any phase-shifting algorithm and interferometer geometry, has few restrictions on surface shape, and unlike spatial Fourier methods, high density spatial carrier fringes are not required, although at least a fringe of phase departure is recommended. Over a 100 × reduction in vibrationally induced surface distortion is achieved for small amplitude vibrations on real data.

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 3, 2009
Revised Manuscript: June 16, 2009
Manuscript Accepted: June 18, 2009
Published: July 6, 2009

Leslie L. Deck, "Suppressing phase errors from vibration in phase-shifting interferometry," Appl. Opt. 48, 3948-3960 (2009)

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