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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 22 — Aug. 1, 2009
  • pp: 4475–4482

Monitoring error compensation in general optical coatings

Ronald R. Willey  »View Author Affiliations


Applied Optics, Vol. 48, Issue 22, pp. 4475-4482 (2009)
http://dx.doi.org/10.1364/AO.48.004475


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Abstract

Error compensation in optical monitoring was demonstrated many years ago for narrow bandpass and edge filters. It is shown here that the compensation effects can apply to a broader range of more general coatings. This is illustrated with a very broadband antireflection coating design of 20 layers and a ramp design of 13 layers. The choice of monitoring wavelength and monitoring strategy are important, and suggestions are made concerning those choices. The results are derived from and demonstrated by computer simulations of the monitoring processes. The importance of monitoring directly on only one part and with one wavelength throughout the process in order to obtain the benefits of error compensation is emphasized.

© 2009 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.4165) Thin films : Multilayer design
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

History
Original Manuscript: May 27, 2009
Manuscript Accepted: July 12, 2009
Published: July 28, 2009

Citation
Ronald R. Willey, "Monitoring error compensation in general optical coatings," Appl. Opt. 48, 4475-4482 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-22-4475


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References

  1. R. R. Willey, “Monitoring thin films of the fence post design and its advantages for narrow bandpass filters,” Appl. Opt. 47, C147-C150 (2008). [CrossRef] [PubMed]
  2. R. R. Willey, “Design and monitoring of narrow bandpass filters composed of non-quarter-wave thicknesses,” Proc. SPIE 7101, 710119 (2008). [CrossRef]
  3. A. Zöller, M. Boos, H. Hagedorn, and B. Romanov, “Computer simulation of coating processes with monochromatic monitoring,” Proc. SPIE 7101, 71010G (2008). [CrossRef]
  4. R. R. Willey and A. Zöller, “Computer simulation of monitoring of narrow bandpass filters at non-turning points,” in 52nd Society of Vacuum Coaters Technical Conference Proceedings (Society of Vacuum Coaters, 2009), paper O-7.
  5. H. A. Macleod, “Turning value monitoring of narrow-band all-dielectric thin-film optical filters,” Opt. Acta 19, 1-28 (1972). [CrossRef]
  6. P. Bousquet, A. Fornier, R. Kowalczyk, E. Pelletier, and P. Roche, “Optical filters: monitoring process allowing the auto-correction of thickness errors,” Thin Solid Films 13, 285-290 (1972). [CrossRef]
  7. H. A. Macleod and E. Pelletier, “Error compensation mechanisms in some thin film monitoring systems,” Opt. Acta 25, 907-930 (1977). [CrossRef]
  8. F. Zhao, “Monitoring of periodic multilayers by the level method,” Appl. Opt. 24, 3339-3342 (1985). [CrossRef] [PubMed]
  9. R. R. Willey, “Sensitivity of Monitoring Strategies for Periodic Multilayers,” in 30th Annual Society of Vacuum Coaters Technical Conference Proceedings (Society of Vacuum Coaters, 1987), pp. 7-14.
  10. R. R. Willey, Practical Design of Optical Thin Films, 2nd ed. (Willey Optical, 2007), Appendix C.
  11. A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, M. A. Kokerev, N. Kaiser, O. Stenzel, S. Wilbrandt, and D. Gäbler, “New optimization algorithm for the synthesis of rugate optical coatings,” Appl. Opt. 45, 1515-1524 (2006). [CrossRef] [PubMed]
  12. D. E. Morton, “Considerations and examples for determining precision of indirect optical monitoring,” in 44th Annual Society of Vacuum Coaters Technical Conference Proceedings (Society of Vacuum Coaters, 2001), pp. 324-327.
  13. R. R. Willey, “Design of optical thin films using the “fencepost” method,” in 50th Annual Society of Vacuum Coaters Technical Conference Proceedings (Society of Vacuum Coaters, 2007), pp. 365-368.
  14. A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and J. A. Dobrowolski, “Estimation of the average residual reflectance of broadband antireflection coatings,” Appl. Opt. 47, C124-C130 (2008). [CrossRef] [PubMed]
  15. J. Kushneir, C. Gogol, and J. Blaise, “Reducing process variation through multiple point crystal sensor monitoring,” 39th Annual Society of Vacuum Coaters Technical Conference Proceedings (Society of Vacuum Coaters, 1996), pp. 19-23.
  16. R. R. Willey, Practical Production of Optical Thin Films (Willey Optical, 2008), Sec. 4.3.3.

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