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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 29 — Oct. 10, 2009
  • pp: 5432–5437

Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging

Michele Suman, Maria Guglielmina Pelizzo, David L. Windt, and Piergiorgio Nicolosi  »View Author Affiliations


Applied Optics, Vol. 48, Issue 29, pp. 5432-5437 (2009)
http://dx.doi.org/10.1364/AO.48.005432


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Abstract

Future solar experiments designed to perform solar plasma diagnostics will also be based on extreme-ultravilet observations. Multilayer (ML) optics are essential in this spectral region since these coatings have high reflectivity at normal incidence. Typically, the reflectivity curve of a ML coating has a small but finite bandwidth, and this can be a serious drawback when several spectral lines fall within the bandwidth. In fact, spectral lines emitted by different ion species can correspond to different plasma conditions. We present the design, realization, and characterization of an innovative ML structure with high reflectivity coupled with a strong rejection ratio for two adjacent spectral features. The key element is an optimized capping layer structure deposited on top of the ML that preserves the performance reflectance at the target wavelength and at the same time suppresses the reflectance at specific adjacent wavelengths. Application to the Fe xv 3 × 10 6 K coronal emission line at 28.4 nm with rejection of the He ii Lyman-α line at 30.4 nm is presented.

© 2009 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(350.6090) Other areas of optics : Space optics
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

History
Original Manuscript: July 2, 2009
Revised Manuscript: September 3, 2009
Manuscript Accepted: September 8, 2009
Published: October 1, 2009

Citation
Michele Suman, Maria Guglielmina Pelizzo, David L. Windt, and Piergiorgio Nicolosi, "Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging," Appl. Opt. 48, 5432-5437 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-29-5432


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References

  1. E. Spiller, Soft X-Ray Optics (SPIE Press, 1994), Chap. 8. [CrossRef]
  2. http://umbra.nascom.nasa.gov/eit/
  3. http://trace.lmsal.com/
  4. B. J. Zhu, Z. Wang, Z. Zhang, F. Wang, H. Wang, W. Wu, S. Zhang, D. Xu, L. Chen, H. Zhou, T. Huo, M. Cui, and Y. Zhao, “High reflectivity multilayer for He-II radiation at 30.4 nm,” Appl. Opt. 47, C310-C314 (2008). [CrossRef] [PubMed]
  5. S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, “Multilayer coating for multiband spectral observations,” in Proceedings of the International Conference on Space Optics (European Space Agency, 2006).
  6. J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. F. Ravet, and A. Jérome, “Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm,” Appl. Opt. 44, 384-390 (2005). [CrossRef] [PubMed]
  7. A. D. Rousseau, D. L. Windt, B. Winter, L. Harra, H. Lamoureux, and F. Eriksson, “Stability of EUV multilayers to long-term heating, and to energetic protons and neutrons, for extreme solar missions,” Proc. SPIE 5900, 590004(2005). [CrossRef]
  8. S. Bajt, N. V. Edwards, and T. E. Madey, “Properties of ultrathin films appropriate for optics capping layers exposed to high energy photon irradiation,” Surf. Sci. Rep. 63, 73-99(2008). [CrossRef]
  9. M. G. Pelizzo, D. Gardiol, P. Nicolosi, A. Patelli, and V. Rigato “Design, deposition, and characterization of multilayer coatings for the Ultraviolet and Visible-Light Coronagraphic Imager,” Appl. Opt. 43, 2661-2669 (2004). [CrossRef] [PubMed]
  10. M. Suman, M. G. Pelizzo, D. L. Windt, G. Monaco, S. Zuccon and P. Nicolosi, “Innovative design of EUV multilayer reflective coating for improved spectral filtering in solar imaging,” in Proceedings of the International Conference on Space Optics (European Space Agency, 2008).
  11. M. Suman, M.-G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47, 2906-2914 (2008). [CrossRef] [PubMed]
  12. D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys. 12, 360-370(1998). [CrossRef]
  13. C. Tarrio, R. N. Watts, T. B. Lucatorto, J. M. Slaughter, and C. M. Falco, “Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials,” Appl. Opt. 37, 4100-4104 (1998). [CrossRef]
  14. D. L. Windt and W. K. Waskiewicz, “Multilayer facilities for EUV lithography,” J. Vac. Sci. Technol. B 12, 3826-3832(1994). [CrossRef]
  15. www.rxollc.com/
  16. http://www.als.lbl.gov/als/techspecs/bl6.3.2.html

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