OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 29 — Oct. 10, 2009
  • pp: 5497–5501

Application of Fresnel diffraction from a phase step to the measurement of film thickness

Mohammad Taghi Tavassoly, Iman Moaddel Haghighi, and Khosrow Hassani  »View Author Affiliations

Applied Optics, Vol. 48, Issue 29, pp. 5497-5501 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (517 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



When a thin film that is prepared in a step form on a substrate and coated uniformly with a reflective material is illuminated by a parallel coherent beam of monochromatic light, the Fresnel diffraction fringes are formed on a screen perpendicular to the reflected beam. The visibility of the fringes depends on film thickness, angle of incidence, and light wavelength. Measuring visibility versus incident angle provides the film thickness with an accuracy of a few nanometers. The technique is easily applicable and it covers a wide range of thicknesses with highly reliable results.

© 2009 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(260.1960) Physical optics : Diffraction theory

ToC Category:
Diffraction and Gratings

Original Manuscript: June 15, 2009
Revised Manuscript: September 13, 2009
Manuscript Accepted: September 14, 2009
Published: October 1, 2009

Mohammad Taghi Tavassoly, Iman Moaddel Haghighi, and Khosrow Hassani, "Application of Fresnel diffraction from a phase step to the measurement of film thickness," Appl. Opt. 48, 5497-5501 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. L. Chopra, Thin Film Phenomena (McGraw-Hill, 1969).
  2. H. K. Pulker, “Film thickness,” in Coating On Glass, H. K. Pulker, ed. (Elsevier, 1984), pp. 287-340.
  3. W. A. Pliskin and S. J. Zanin, “Film thickness and composition,” in Handbook of Thin Film Technology, L. I. Maissel and R. Glang, eds. (McGraw-Hill, 1970), pp. 11:1-11:54.
  4. “Film thickness,” in Semiconductor Measurements and Instrumentation, W. R. Runyan and T. J. Shaffner, eds. (McGraw-Hill, 1998), pp. 177-199.
  5. D. M. Mattox, “Non-elemental characterization of films and coatings,” in Handbook of Deposition Technologies for Films and Coatings, R. F. Bunshah, ed. (Noyes, 1994).
  6. L. Eckertová, Physics of Thin Films (SNTL, 1986).
  7. S. Tolansky, Multiple Beam Interferometries (Clarendon, 1948).
  8. C. Weaver and P. Benjamin, “Measurement of the thickness of thin films by multiple-beam interference,” Nature 177, 1030-1031 (1956). [CrossRef]
  9. O. S. Heavens, “Measurement of the thickness of thin films by multiple-beam interferometry,” Proc. Phys. Soc. B 64, 419-425(1951). [CrossRef]
  10. C. Weaver and P. Benjamin, “Errors in the measurement of film thickness by multiple-beam interferometry,” Nature 182, 1149-1150 (1958). [CrossRef]
  11. K. Seung-Woo and K. Gee-Hong, “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968-5973 (1999). [CrossRef]
  12. P. Hlubina, J. Lunacek, and D. Ciprian, “White-light spectral interferometry and reflectometry to measure thickness of thin films,” Proc. SPIE 7389, 738926 (2009). [CrossRef]
  13. A. Franquet, J. De Laet, T. Schram, H. Terryn, V. Subramanian, W. J. van Ooij, and J. Vereecken, “Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry,” Thin Solid Films 384, 37-45(2001). [CrossRef]
  14. M. T. Tavassoly, M. Amiri, A. Darudi, R. Alipour, A. Saber, and A.-R. Moradi, “Optical diffractometry,” J. Opt. Soc. Am. A 26, 540-547 (2009). [CrossRef]
  15. M. Amiri and M. T. Tavassoly, “Fresnel diffraction from 1D and 2D phase steps in reflection and transmission modes,” Opt. Commun. 272, 349-361 (2007). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited