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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 29 — Oct. 10, 2009
  • pp: 5497–5501

Application of Fresnel diffraction from a phase step to the measurement of film thickness

Mohammad Taghi Tavassoly, Iman Moaddel Haghighi, and Khosrow Hassani  »View Author Affiliations


Applied Optics, Vol. 48, Issue 29, pp. 5497-5501 (2009)
http://dx.doi.org/10.1364/AO.48.005497


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Abstract

When a thin film that is prepared in a step form on a substrate and coated uniformly with a reflective material is illuminated by a parallel coherent beam of monochromatic light, the Fresnel diffraction fringes are formed on a screen perpendicular to the reflected beam. The visibility of the fringes depends on film thickness, angle of incidence, and light wavelength. Measuring visibility versus incident angle provides the film thickness with an accuracy of a few nanometers. The technique is easily applicable and it covers a wide range of thicknesses with highly reliable results.

© 2009 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(260.1960) Physical optics : Diffraction theory

ToC Category:
Diffraction and Gratings

History
Original Manuscript: June 15, 2009
Revised Manuscript: September 13, 2009
Manuscript Accepted: September 14, 2009
Published: October 1, 2009

Citation
Mohammad Taghi Tavassoly, Iman Moaddel Haghighi, and Khosrow Hassani, "Application of Fresnel diffraction from a phase step to the measurement of film thickness," Appl. Opt. 48, 5497-5501 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-29-5497


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References

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