Measurement range of phase retrieval in optical surface and wavefront metrology
Applied Optics, Vol. 48, Issue 3, pp. 442-449 (2009)
http://dx.doi.org/10.1364/AO.48.000442
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Abstract
Phase retrieval employs very simple data collection hardware and iterative algorithms to determine the phase of an optical field. We have derived limitations on phase retrieval, as applied to optical surface and wavefront metrology, in terms of the speed of beam (i.e., f-number or numerical aperture) and amount of aberration using arguments based on sampling theory and geometrical optics. These limitations suggest methodologies for expanding these ranges by increasing the complexity of the measurement arrangement, the phase-retrieval algorithm, or both. We have simulated one of these methods where a surface is measured at unusual conjugates.
© 2009 Optical Society of America
OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing
ToC Category:
Image Processing
History
Original Manuscript: July 3, 2008
Revised Manuscript: October 31, 2008
Manuscript Accepted: December 9, 2008
Published: January 12, 2009
Citation
Gregory R. Brady and James R. Fienup, "Measurement range of phase retrieval in optical surface and wavefront metrology," Appl. Opt. 48, 442-449 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-3-442
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