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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 30 — Oct. 20, 2009
  • pp: 5713–5717

Microreflectance difference spectrometer based on a charge coupled device camera: surface distribution of polishing-related linear defect density in GaAs (001)

L. F. Lastras-Martínez, R. Castro-García, R. E. Balderas-Navarro, and A. Lastras-Martínez  »View Author Affiliations


Applied Optics, Vol. 48, Issue 30, pp. 5713-5717 (2009)
http://dx.doi.org/10.1364/AO.48.005713


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Abstract

We describe a microreflectance difference ( μRD ) spectrometer based on a charge coupled device (CCD), in contrast to most common RD spectrometers that are based on a photomultiplier or a photodiode as a light detector. The advantage of our instrument over others is the possibility to isolate the RD spectrum of specific areas of the sample; thus topographic maps of the surface can be obtained. In our setup we have a maximum spatial resolution of approximately 2.50 μ m × 2.50 μ m and a spectral range from 1.2 to 5.5 eV . To illustrate the performance of the spectrometer, we have measured strains in mechanically polished GaAs ( 001 ) single crystals.

© 2009 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(300.6470) Spectroscopy : Spectroscopy, semiconductors

ToC Category:
Spectroscopy

History
Original Manuscript: August 3, 2009
Revised Manuscript: October 2, 2009
Manuscript Accepted: October 4, 2009
Published: October 20, 2009

Citation
L. F. Lastras-Martínez, R. Castro-García, R. E. Balderas-Navarro, and A. Lastras-Martínez, "Microreflectance difference spectrometer based on a charge coupled device camera: surface distribution of polishing-related linear defect density in GaAs (001)," Appl. Opt. 48, 5713-5717 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-30-5713

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