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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 31 — Nov. 1, 2009
  • pp: 5906–5916

Optical diagnostics of anisotropic nanoscale films on transparent isotropic materials by integrating reflectivity and ellipsometry

Peep Adamson  »View Author Affiliations

Applied Optics, Vol. 48, Issue 31, pp. 5906-5916 (2009)

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The reflection of s- and p-polarized electromagnetic plane waves from an anisotropic ultrathin dielectric film on transparent isotropic substrate is investigated in the long-wavelength limit. The analytical approximate formulas are obtained for the reflection coefficients and ellipsometric angles that agree with the exact computer solution of the reflection problem for anisotropic systems. The possibilities of using the obtained expressions for resolving the inverse problem for ultrathin anisotropic dielectric films upon isotropic dielectric substrates are discussed. It is shown that a promising technique for determining the optical constants of anisotropic dielectric films on transparent substrates is the integration of ellipsometry and differential reflectivity.

© 2009 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(240.0310) Optics at surfaces : Thin films
(260.2110) Physical optics : Electromagnetic optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Physical Optics

Original Manuscript: June 26, 2009
Revised Manuscript: September 19, 2009
Manuscript Accepted: October 6, 2009
Published: October 21, 2009

Peep Adamson, "Optical diagnostics of anisotropic nanoscale films on transparent isotropic materials by integrating reflectivity and ellipsometry," Appl. Opt. 48, 5906-5916 (2009)

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