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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 31 — Nov. 1, 2009
  • pp: 5970–5977

Radiometry and metrology of a phase zone plate measured by extreme ultraviolet synchrotron radiation

John F. Seely, Benjawan Kjornrattanawanich, James C. Bremer, Michael Kowalski, and Yan Feng  »View Author Affiliations


Applied Optics, Vol. 48, Issue 31, pp. 5970-5977 (2009)
http://dx.doi.org/10.1364/AO.48.005970


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Abstract

The diffraction efficiency, focal length, and other radiometric and metrology properties of a phase zone plate were measured by using monochromatic synchrotron radiation in the 7– 18.5 nm wavelength range. The zone plate was composed of molybdenum zones having a 4 mm outer diameter and 70 nm nominal thickness and supported on a 100 nm thick silicon nitride membrane. The diffraction efficiency was enhanced by the phase shift of the radiation passing through the zones. The measured first-order efficiency was in good agreement with the calculated efficiency. The properties of the zone plate, particularly the small variation of the efficiency with off-axis angle, make it suitable for use in a radiometer to accurately measure the absolutely calibrated extreme ultraviolet emission from the Sun.

© 2009 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(050.5080) Diffraction and gratings : Phase shift
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(120.6085) Instrumentation, measurement, and metrology : Space instrumentation

ToC Category:
Diffraction and Gratings

History
Original Manuscript: July 29, 2009
Manuscript Accepted: September 19, 2009
Published: October 23, 2009

Citation
John F. Seely, Benjawan Kjornrattanawanich, James C. Bremer, Michael Kowalski, and Yan Feng, "Radiometry and metrology of a phase zone plate measured by extreme ultraviolet synchrotron radiation," Appl. Opt. 48, 5970-5977 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-31-5970

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