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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 32 — Nov. 10, 2009
  • pp: 6105–6110

Long-term stabilization of a heterodyne metrology interferometer down to a noise level of 20 pm over an hour

Yoshito Niwa, Koji Arai, Akitoshi Ueda, Masaaki Sakagami, Naoteru Gouda, Yukiyasu Kobayashi, Yoshiyuki Yamada, and Taihei Yano  »View Author Affiliations

Applied Optics, Vol. 48, Issue 32, pp. 6105-6110 (2009)

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A heterodyne metrology interferometer was stabilized down to a noise level of 20 picometers (pm) as a root-mean-square (RMS) value integrated between 0.3 mHz and 1 Hz . This noise level was achieved by employing active and passive interferometer stabilization techniques. The heterodyne interferometer was built on a 50 mm square ultralow expansion glass plate in order to reduce an optical path length change caused by temperature variation. An optical configuration of the interferometer is a Mach– Zehnder interferometer with a design as symmetric as possible so that a detection signal can be insensitive to homogeneous thermal expansion of the glass plate. The heterodyne frequency is actively controlled in order to suppress residual noises caused by optical path length changes outside of the glass plate as well as phase fluctuations of the heterodyne frequency source. Our stabilization scheme is considered useful in achieving the 20 pm noise level without a stable heterodyne frequency source, as well as temperature stabilization around a whole apparatus. This interferometer can be used in precise metrology applications, such as characterization of deformation for satellite optical components against thermal exposure.

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 15, 2009
Revised Manuscript: October 3, 2009
Manuscript Accepted: October 9, 2009
Published: November 2, 2009

Yoshito Niwa, Koji Arai, Akitoshi Ueda, Masaaki Sakagami, Naoteru Gouda, Yukiyasu Kobayashi, Yoshiyuki Yamada, and Taihei Yano, "Long-term stabilization of a heterodyne metrology interferometer down to a noise level of 20 pm over an hour," Appl. Opt. 48, 6105-6110 (2009)

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