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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 34 — Dec. 1, 2009
  • pp: 6583–6593

Design of a micro-opto-electro-mechanical-system-based near-infrared hyperspectral imager

Thomas Egloff, Jens Knobbe, Stefan Sinzinger, and Heinrich Grüger  »View Author Affiliations

Applied Optics, Vol. 48, Issue 34, pp. 6583-6593 (2009)

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We present the development of an imaging spectrometer for the near infrared (NIR) using a micro- opto-electromechanical system. A diffraction grating has been etched into the surface of a micro mechanical scanning mirror made of silicon and is used to scan the object space and to disperse the NIR radiation simultaneously. Beginning with the specific requirements of NIR hyperspectral imaging, a detailed analysis of the system approach resulting in an all-reflective optical design for the hyperspectral imager is presented. The investigation includes a thorough consideration of spectral and spatial distortion occurring by scanning the scene with a grating. Minimization of these aberrations leads to an improved spectrometer design.

© 2009 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(230.4040) Optical devices : Mirrors
(300.6390) Spectroscopy : Spectroscopy, molecular
(110.4234) Imaging systems : Multispectral and hyperspectral imaging
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Imaging Systems

Original Manuscript: August 7, 2009
Revised Manuscript: October 30, 2009
Manuscript Accepted: November 2, 2009
Published: November 23, 2009

Thomas Egloff, Jens Knobbe, Stefan Sinzinger, and Heinrich Grüger, "Design of a micro-opto-electro-mechanical-system-based near-infrared hyperspectral imager," Appl. Opt. 48, 6583-6593 (2009)

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