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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 34 — Dec. 1, 2009
  • pp: H40–H47

Spatial coherence profilometry on tilted surfaces

Pavel Pavliček, Marek Halouzka, Zhihui Duan, and Mitsuo Takeda  »View Author Affiliations


Applied Optics, Vol. 48, Issue 34, pp. H40-H47 (2009)
http://dx.doi.org/10.1364/AO.48.000H40


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Abstract

The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The systematic measurement error depends not only on the tilt angle but also on the parameters of the experimental setup. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light inter ferometry. We also suggest the conditions to obtain correct measurements by use of spatial coherence profilometry.

© 2009 Optical Society of America

OCIS Codes
(030.1640) Coherence and statistical optics : Coherence
(030.1670) Coherence and statistical optics : Coherent optical effects
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

History
Original Manuscript: May 27, 2009
Revised Manuscript: September 2, 2009
Manuscript Accepted: September 2, 2009
Published: September 29, 2009

Citation
Pavel Pavliček, Marek Halouzka, Zhihui Duan, and Mitsuo Takeda, "Spatial coherence profilometry on tilted surfaces," Appl. Opt. 48, H40-H47 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-34-H40

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