Design of error-compensating algorithms for sinusoidal phase shifting interferometry
Applied Optics, Vol. 48, Issue 35, pp. 6788-6796 (2009)
http://dx.doi.org/10.1364/AO.48.006788
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Abstract
An improved approach to interferometry using sinusoidal phase shifting balances several harmonic components in the interference signal against each other. The resulting computationally efficient phase- estimation algorithms have low sensitivity to errors such as spurious intensity noise, vibration, and errors in the phase shift pattern. Specific example algorithms employing 8 and 12 camera frames illustrate design principles that are extendable to algorithms of any length for applications that would benefit from a simplified, sinusoidal phase shift.
© 2009 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(180.3170) Microscopy : Interference microscopy
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 12, 2009
Revised Manuscript: November 3, 2009
Manuscript Accepted: November 5, 2009
Published: December 3, 2009
Citation
Peter de Groot, "Design of error-compensating algorithms for sinusoidal phase shifting interferometry," Appl. Opt. 48, 6788-6796 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-35-6788
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