Fast computation of constructive and destructive interference areas in partially coherent imaging for resolution enhancement in optical microlithography
Applied Optics, Vol. 48, Issue 8, pp. 1419-1424 (2009)
http://dx.doi.org/10.1364/AO.48.001419
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Abstract
We present a method to determine constructive and destructive interference areas on the object plane in partially coherent imaging. This method is based on the interference pattern on the image plane. A function Γ that shows constructive and destructive interference areas with respect to the origin on the object plane is derived as the product of mutual intensity on the object plane and the Fourier transform of the pupil function. The convolution integral of Γ and object transmittance gives the constructive and destructive interference areas. Experimental results show that small clear openings placed at constructive interference areas enhance light intensity at desired positions. By applying this method to optical microlithography imaging, one can achieve resolution enhancement of fine features with a relatively small amount of computation.
© 2009 Optical Society of America
OCIS Codes
(110.2990) Imaging systems : Image formation theory
(110.4980) Imaging systems : Partial coherence in imaging
(110.5220) Imaging systems : Photolithography
ToC Category:
Imaging Systems
History
Original Manuscript: August 13, 2008
Revised Manuscript: November 18, 2008
Manuscript Accepted: December 17, 2008
Published: March 3, 2009
Citation
Kenji Yamazoe, Yoshiyuki Sekine, and Tokuyuki Honda, "Fast computation of constructive and destructive interference areas in partially coherent imaging for resolution enhancement in optical microlithography," Appl. Opt. 48, 1419-1424 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-8-1419
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