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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 8 — Mar. 10, 2009
  • pp: 1494–1501

Deterministic convergence in iterative phase shifting

Esteban Luna, Luis Salas, Erika Sohn, Elfego Ruiz, Juan M. Nunez, and Joel Herrera  »View Author Affiliations


Applied Optics, Vol. 48, Issue 8, pp. 1494-1501 (2009)
http://dx.doi.org/10.1364/AO.48.001494


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Abstract

Previous implementations of the iterative phase shifting method, in which the phase of a test object is computed from measurements using a phase shifting interferometer with unknown positions of the reference, do not provide an accurate way of knowing when convergence has been attained. We present a new approach to this method that allows us to deterministically identify convergence. The method is tested with a home-built Fizeau interferometer that measures optical surfaces polished to λ / 100 using the Hydra tool. The intrinsic quality of the measurements is better than 0.5 nm . Other possible applications for this technique include fringe projection or any problem where phase shifting is involved.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 24, 2008
Revised Manuscript: January 30, 2009
Manuscript Accepted: February 11, 2009
Published: March 2, 2009

Citation
Esteban Luna, Luis Salas, Erika Sohn, Elfego Ruiz, Juan M. Nunez, and Joel Herrera, "Deterministic convergence in iterative phase shifting," Appl. Opt. 48, 1494-1501 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-8-1494


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References

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  2. D. Malacara, Optical Shop Testing (Wiley, 2007), Chap. 14. [CrossRef]
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  9. E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” U.S. patent 7,169,012 (30 January 2007).
  10. M. Nunez, E. Luna, L. Salas, E. López, F. Quiroz, and J. Salinas, “Interferometro de Fizeau para pruebas de superficies opticas,” Technical Report RT-2004-01 (Instituto de Astronomía, Universidad Nacional Autónoma de México, 2004).
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