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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 9 — Mar. 20, 2009
  • pp: 1651–1657

Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams

Chao Guo and Lijiang Zeng  »View Author Affiliations

Applied Optics, Vol. 48, Issue 9, pp. 1651-1657 (2009)

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We propose an experimental method for measuring the period difference in a grating pair. The method uses the relationship between the period difference and the phase difference of diffraction beams of the grating pair when gratings are translated along the grating-vector direction. The effect of the roll angular deviation of gratings can be eliminated by phase compensation with + 1 st- and 1 st-order diffraction beams. Far-field intensity patterns of diffraction beams are monitored to adjust the relative attitude of gratings. For a pair of gratings with periods of 0.674 μm , the period difference was measured to be 0.4434 nm with an expanded uncertainty ( k = 2 ) of 0.0113 nm .

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Diffraction and Gratings

Original Manuscript: December 10, 2008
Revised Manuscript: February 21, 2009
Manuscript Accepted: February 22, 2009
Published: March 11, 2009

Chao Guo and Lijiang Zeng, "Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams," Appl. Opt. 48, 1651-1657 (2009)

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