Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams
Applied Optics, Vol. 48, Issue 9, pp. 1651-1657 (2009)
http://dx.doi.org/10.1364/AO.48.001651
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Abstract
We propose an experimental method for measuring the period difference in a grating pair. The method uses the relationship between the period difference and the phase difference of diffraction beams of the grating pair when gratings are translated along the grating-vector direction. The effect of the roll angular deviation of gratings can be eliminated by phase compensation with
© 2009 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
ToC Category:
Diffraction and Gratings
History
Original Manuscript: December 10, 2008
Revised Manuscript: February 21, 2009
Manuscript Accepted: February 22, 2009
Published: March 11, 2009
Citation
Chao Guo and Lijiang Zeng, "Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams," Appl. Opt. 48, 1651-1657 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-9-1651
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