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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 1 — Jan. 1, 2010
  • pp: 21–31

Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors

Peng Su, James H. Burge, and Robert E. Parks  »View Author Affiliations

Applied Optics, Vol. 49, Issue 1, pp. 21-31 (2010)

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Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near perfect or is accurately known from some other test, then the shape of the unknown surface can be determined. We investigate the case where neither the reference surface nor the surface under test is well known. By making multiple shear measurements where both surfaces are translated and/or rotated, we obtain sufficient information to reconstruct the figure of both surfaces with a maximum likelihood reconstruction method. The method is demonstrated for the measurement of a 1.6 m flat mirror to 2 nm rms, using a smaller reference mirror that had significant figure error.

© 2010 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 22, 2009
Revised Manuscript: November 18, 2009
Manuscript Accepted: November 20, 2009
Published: December 21, 2009

Peng Su, James H. Burge, and Robert E. Parks, "Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors," Appl. Opt. 49, 21-31 (2010)

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