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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 12 — Apr. 20, 2010
  • pp: 2371–2375

Self-calibrating lateral scanning white-light interferometer

Florin Munteanu  »View Author Affiliations

Applied Optics, Vol. 49, Issue 12, pp. 2371-2375 (2010)

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Lateral scanning white-light interferometry represents an attractive alternative to the standard white-light interferometry. Its main advantage over the latter procedure consists in the ability to scan large samples continuously, without the need of a cumbersome stitching procedure. Presently, the main drawback in the path of large-scale industrial acceptance of this method is the need for careful calibration of the tilt angle prior to each measurement. A novel self-calibration approach is presented. Using the data acquired during the normal scanning process, the need of an initial tilt angle calibration is eliminated and on-the-fly system adjustments for the best signal-to-noise ratio can be performed without an increase in the measurement time dictated by recalibration.

© 2010 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(180.3170) Microscopy : Interference microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 18, 2010
Manuscript Accepted: March 29, 2010
Published: April 15, 2010

Florin Munteanu, "Self-calibrating lateral scanning white-light interferometer," Appl. Opt. 49, 2371-2375 (2010)

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