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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 14 — May. 10, 2010
  • pp: 2539–2546

Optical constants of crystalline Hf O 2 for energy range 140 930 eV

Elena Filatova, Andrey Sokolov, Jean-Michel André, Franz Schaefers, and Walter Braun  »View Author Affiliations

Applied Optics, Vol. 49, Issue 14, pp. 2539-2546 (2010)

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We calculated the optical constants of the monoclinic phase of a Hf O 2 film from reflection spectra measured using synchrotron radiation in the spectral region from 143 eV to 927 eV , which includes the Hf N 4 , 5 , Hf N 2 , 3 , and OK absorption edges. The calculations were carried out using the Kramers– Kronig relations. It could be shown that the relation R ( E ) E 4 can be used for extrapolation of the experimental reflection spectrum of Hf O 2 (and probably of other heavy elements) for energies such that θ / θ c > 3.7 .

© 2010 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 4, 2009
Revised Manuscript: March 25, 2010
Manuscript Accepted: March 26, 2010
Published: May 4, 2010

Elena Filatova, Andrey Sokolov, Jean-Michel André, Franz Schaefers, and Walter Braun, "Optical constants of crystalline HfO2 for energy range 140–930 eV," Appl. Opt. 49, 2539-2546 (2010)

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