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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 14 — May. 10, 2010
  • pp: 2658–2664

Optical accelerometer based on high-order diffraction beam interference

Liuhua Chen, Qiao Lin, Shu Li, and X. Wu  »View Author Affiliations

Applied Optics, Vol. 49, Issue 14, pp. 2658-2664 (2010)

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We design and fabricate a novel optical accelerometer based on high-order diffraction beam interference with a built-in phase-generated carrier modulator. A proof-of-concept prototype is tested and achieves a resolution of 96 ng / Hz with a dynamic range of 60 g . By employing optical interference between ± 1 order diffraction beams from a grating translating perpendicular to an optical beam for acceleration sensing, the accelerometer realizes a wide dynamic range, while maintaining a high resolution. Compared with prior optical accelerometers, the interference in this structure is free from the effect of short coherence length or beam divergence, and a greater than ordinary dynamic range is obtained. The proposed design is also applicable to a MOEMS platform, offering a new thought in the design of high-performance MOEMS accelerometers.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5080) Diffraction and gratings : Phase shift
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:
Remote Sensing and Sensors

Original Manuscript: January 29, 2010
Revised Manuscript: April 6, 2010
Manuscript Accepted: April 12, 2010
Published: May 4, 2010

Liuhua Chen, Qiao Lin, Shu Li, and X. Wu, "Optical accelerometer based on high-order diffraction beam interference," Appl. Opt. 49, 2658-2664 (2010)

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  1. B. Lee, “Review of the present status of optical fiber sensors,” Opt. Fiber Technol. 9, 57–79 (2003). [CrossRef]
  2. B. Lee, S. Roh, and J. Park, “Current status of micro- and nano-structured optical fiber sensors,” Opt. Fiber Technol. 15, 209–221 (2009). [CrossRef]
  3. J. Nayak, T. Srinivas, A. Selvarajan, and D. V. K. Sastry, “Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass,” J. Microlith. Microfab. Microsyst. 5, 043012 (2006). [CrossRef]
  4. C. Z. Shi, N. Zeng, H. L. Ho, C. C. Chan, M. Zhang, W. Jin, and Y. B. Liao, “Cantilever optical vibrometer using fiber Bragg grating,” Opt. Eng. 42, 3179–3181 (2003). [CrossRef]
  5. P. M. Nieva, N. E. McGruer, and G. G. Adams, “Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications,” J. Micromech. Microeng. 16, 2618–2631 (2006). [CrossRef]
  6. R. D. Pechstedt and D. A. Jackson, “Design of a compliant-cylinder-type fiber-optic accelerometer: theory and experiment,” Appl. Opt. 34, 3009–3017 (1995). [CrossRef] [PubMed]
  7. G. A. Cranch and P. J. Nash, “High-responsivity fiber-optic flexural disk accelerometers,” J. Lightwave Technol. 18, 1233–1243 (2000). [CrossRef]
  8. Y. Wang, H. Xiao, S. Zhang, F. Li, and Y. Liu, “Design of a fibre-optic disc accelerometer theory and experiment,” Meas. Sci. Technol. 18, 1763–1767 (2007). [CrossRef]
  9. J. Thiel and E. Spanner, “Interferential linear encoder with 270 mm measurement length for nanometrology,” in Proceedings of the 1st International European Society for Precision Engineering and Nanotechnology Conference (1999), Vol. II, pp. 419–422.
  10. A. Cekorich, “Demodulator for interferometric sensors,” Proc. SPIE 3860, 338–347 (1999). [CrossRef]
  11. A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, “Homodyne demodulation scheme for fibre-optic sensors using phase generated carrier,” Quantum Electron. 18, 1647–1653 (1982). [CrossRef]
  12. L. Ristic, Sensor Technology and Devices (Artech House, 1994), p. 50.
  13. C. Rathjen, “Statistical properties of phase-shift algorithms,” J. Opt. Soc. Am. A 12, 1997–2008 (1995). [CrossRef]
  14. T. B. Gabrielson, “Mechanical-thermal noise in micromachined acoustic and vibration sensors,” IEEE Trans. Electron, Devices 40, 903–909 (1993). [CrossRef]

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