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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 14 — May. 10, 2010
  • pp: 2658–2664

Optical accelerometer based on high-order diffraction beam interference

Liuhua Chen, Qiao Lin, Shu Li, and X. Wu  »View Author Affiliations


Applied Optics, Vol. 49, Issue 14, pp. 2658-2664 (2010)
http://dx.doi.org/10.1364/AO.49.002658


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Abstract

We design and fabricate a novel optical accelerometer based on high-order diffraction beam interference with a built-in phase-generated carrier modulator. A proof-of-concept prototype is tested and achieves a resolution of 96 ng / Hz with a dynamic range of 60 g . By employing optical interference between ± 1 order diffraction beams from a grating translating perpendicular to an optical beam for acceleration sensing, the accelerometer realizes a wide dynamic range, while maintaining a high resolution. Compared with prior optical accelerometers, the interference in this structure is free from the effect of short coherence length or beam divergence, and a greater than ordinary dynamic range is obtained. The proposed design is also applicable to a MOEMS platform, offering a new thought in the design of high-performance MOEMS accelerometers.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.5080) Diffraction and gratings : Phase shift
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:
Remote Sensing and Sensors

History
Original Manuscript: January 29, 2010
Revised Manuscript: April 6, 2010
Manuscript Accepted: April 12, 2010
Published: May 4, 2010

Citation
Liuhua Chen, Qiao Lin, Shu Li, and X. Wu, "Optical accelerometer based on high-order diffraction beam interference," Appl. Opt. 49, 2658-2664 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-14-2658

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