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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 15 — May. 20, 2010
  • pp: 2806–2812

Reduction of light reflection at silicon-plate surfaces by means of subwavelength gratings in terahertz region

Shin-ichi Kuroo, Satoshi Oyama, Kazuo Shiraishi, Hiroyuki Sasho, and Kazushiro Fukushima  »View Author Affiliations

Applied Optics, Vol. 49, Issue 15, pp. 2806-2812 (2010)

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We investigate triangular surface-relief gratings for reducing reflection at a planar silicon surface for light in the terahertz frequency region of 0.3 3.0 THz . Structural parameters of the one- and two- dimensional (1D 2D) subwavelength gratings required for the antireflection (AR) layer were obtained numerically. Experimental results for the AR effects agreed well with those obtained numerically, except for gratings fabricated with laser ablation, which causes structural fluctuations of the grating. In the 1D grating, a high transmittance exceeding 90% for the TM wave was obtained. 2D gratings comprised of arrayed micropyramids were experimentally confirmed to be polarization insensitive.

© 2010 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(350.2770) Other areas of optics : Gratings
(300.6495) Spectroscopy : Spectroscopy, teraherz
(050.6624) Diffraction and gratings : Subwavelength structures
(310.6628) Thin films : Subwavelength structures, nanostructures
(240.3990) Optics at surfaces : Micro-optical devices

ToC Category:
Diffraction and Gratings

Original Manuscript: March 15, 2010
Manuscript Accepted: April 13, 2010
Published: May 13, 2010

Shin-ichi Kuroo, Satoshi Oyama, Kazuo Shiraishi, Hiroyuki Sasho, and Kazushiro Fukushima, "Reduction of light reflection at silicon-plate surfaces by means of subwavelength gratings in terahertz region," Appl. Opt. 49, 2806-2812 (2010)

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