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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 15 — May. 20, 2010
  • pp: 2806–2812

Reduction of light reflection at silicon-plate surfaces by means of subwavelength gratings in terahertz region

Shin-ichi Kuroo, Satoshi Oyama, Kazuo Shiraishi, Hiroyuki Sasho, and Kazushiro Fukushima  »View Author Affiliations


Applied Optics, Vol. 49, Issue 15, pp. 2806-2812 (2010)
http://dx.doi.org/10.1364/AO.49.002806


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Abstract

We investigate triangular surface-relief gratings for reducing reflection at a planar silicon surface for light in the terahertz frequency region of 0.3 3.0 THz . Structural parameters of the one- and two- dimensional (1D 2D) subwavelength gratings required for the antireflection (AR) layer were obtained numerically. Experimental results for the AR effects agreed well with those obtained numerically, except for gratings fabricated with laser ablation, which causes structural fluctuations of the grating. In the 1D grating, a high transmittance exceeding 90% for the TM wave was obtained. 2D gratings comprised of arrayed micropyramids were experimentally confirmed to be polarization insensitive.

© 2010 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(350.2770) Other areas of optics : Gratings
(300.6495) Spectroscopy : Spectroscopy, teraherz
(050.6624) Diffraction and gratings : Subwavelength structures
(310.6628) Thin films : Subwavelength structures, nanostructures
(240.3990) Optics at surfaces : Micro-optical devices

ToC Category:
Diffraction and Gratings

History
Original Manuscript: March 15, 2010
Manuscript Accepted: April 13, 2010
Published: May 13, 2010

Citation
Shin-ichi Kuroo, Satoshi Oyama, Kazuo Shiraishi, Hiroyuki Sasho, and Kazushiro Fukushima, "Reduction of light reflection at silicon-plate surfaces by means of subwavelength gratings in terahertz region," Appl. Opt. 49, 2806-2812 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-15-2806


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References

  1. J. Van Rudd and D. M. Mittleman, “Influence of substrate-lens design in terahertz time-domain spectroscopy,” J. Opt. Soc. Am. B 19, 319–329 (2002). [CrossRef]
  2. D. Vandormeal, S. Habraken, J. Loicq, C. Lenaerts, and D. Mawet. “Antireflective subwavelength patterning of IR optics,” Proc. SPIE 6395, 63950L (2006).
  3. F. Nikolajeff, B. Lofving, M. Johansson, J. Bengtsson, S. Hard, and Claus Heine, “Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings,” Appl. Opt. 39, 4842–4846 (2000). [CrossRef]
  4. E. B. Grann, M. G. Moharam, and D. A. Pommet, “Optimal design for antireflective tapered two-dimensional subwavelength grating structures,” J. Opt. Soc. Am. A 12, 333–339(1995). [CrossRef]
  5. A. G. Lopez and H. G. Craighead, “Subwavelength surface-relief gratings fabricated by microcontact printing of self-assembled monolayers,” Appl. Opt. 40, 2068–2075 (2001). [CrossRef]
  6. R. E. Smith, M. E. Warren, J. R. Wendt, and G. A. Vawter, “Polarization-sensitive subwavelength antireflection surfaces on a semiconductor for 975nm,” Opt. Lett. 21, 1201–1203 (1996). [CrossRef] [PubMed]
  7. D. L. Brundrett, T. K. Gaylord, and E. N. Glytsis, “Polarizing mirror/absorber for visible wavelengths based on a silicon subwavelength grating,” Appl. Opt. 37, 2534–2541 (1998). [CrossRef]
  8. C-H. Sun, B. J. Ho, B. Jiang, and P. Jiang, “Biomimetic subwavelength antireflective gratings on GaAs,” Opt. Lett. 33, 2224–2226 (2008). [CrossRef] [PubMed]
  9. S. Kuroo, K. Shiraishi, H. Sasho, H. Yoda, and K. Muro, “Triangular surface-relief grating for reduction of reflection from silicon surface in the 0.1–3 terahertz region,” in Proceedings of the Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science, 2008 (IEEE, 2008), pp. 1–2.
  10. S. Kuroo, K. Shiraishi, and H. Sashou, “Optical components,” Japanese patent application 2008-061993 (12 March 2008).
  11. Y. W. Chen, P. Y. Han, and X.-C. Zhang, “Tunable broadband antireflection structures for silicon at terahertz frequency,” Appl. Phys. Lett. 94, 041106 (2009). [CrossRef]
  12. W. L. Bragg and A. B. Pippard, “The form birefringence of macromolecules,” Acta Cryst. 6, 865–867 (1953). [CrossRef]
  13. M. Born and E. Wolf, Principles of Optics (Pergamon, 1975), pp. 705–708.
  14. K. Shiraishi, T. Sato, and S. Kawakami, “Experimental verification of a form-birefringent polarization splitter,” Appl. Phys. Lett., 58, 211–212 (1991). [CrossRef]
  15. K. Shiraishi and K. Matsumura, “Fabrication of spatial walk-off polarizing films by oblique deposition,” Quantum Electron. 30, 2417–2420 (1994). [CrossRef]

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