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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 16 — Jun. 1, 2010
  • pp: 3231–3234

Variable angle of incidence spectroscopic autocollimating ellipsometer

Lionel R. Watkins and Sophie S. Shamailov  »View Author Affiliations

Applied Optics, Vol. 49, Issue 16, pp. 3231-3234 (2010)

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We present a spectroscopic, autocollimating ellipsometer capable of operating at arbitrary angles of incidence. Linearly polarized light incident on a sample is circularly polarized on reflection, ensuring that the retroreflected beam is orthogonal to the input polarization state. In order to achieve this at arbitrary angles of incidence, a Soleil–Babinet compensator (SBC) is introduced with its fast axis fixed horizontally. Nulling is achieved by varying the SBC delay and the azimuthal angle of the input linear polarization. A single calibration equation at a fixed wavelength and a knowledge of the wavelength dependence of the compensator birefringence enables the delay to be accurately calculated at any wavelength. Single- wavelength, variable angle of incidence measurements made on a thick gold film are in excellent agreement with those obtained with a traditional null ellipsometer. Spectroscopic measurements at a fixed angle of incidence of a silicon dioxide film on a silicon substrate yield thicknesses that are in excel lent agreement with independent measurements made with a null ellipsometer and a commercial instrument.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 8, 2010
Manuscript Accepted: April 26, 2010
Published: May 31, 2010

Lionel R. Watkins and Sophie S. Shamailov, "Variable angle of incidence spectroscopic autocollimating ellipsometer," Appl. Opt. 49, 3231-3234 (2010)

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