OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 16 — Jun. 1, 2010
  • pp: 3231–3234

Variable angle of incidence spectroscopic autocollimating ellipsometer

Lionel R. Watkins and Sophie S. Shamailov  »View Author Affiliations


Applied Optics, Vol. 49, Issue 16, pp. 3231-3234 (2010)
http://dx.doi.org/10.1364/AO.49.003231


View Full Text Article

Enhanced HTML    Acrobat PDF (250 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a spectroscopic, autocollimating ellipsometer capable of operating at arbitrary angles of incidence. Linearly polarized light incident on a sample is circularly polarized on reflection, ensuring that the retroreflected beam is orthogonal to the input polarization state. In order to achieve this at arbitrary angles of incidence, a Soleil–Babinet compensator (SBC) is introduced with its fast axis fixed horizontally. Nulling is achieved by varying the SBC delay and the azimuthal angle of the input linear polarization. A single calibration equation at a fixed wavelength and a knowledge of the wavelength dependence of the compensator birefringence enables the delay to be accurately calculated at any wavelength. Single- wavelength, variable angle of incidence measurements made on a thick gold film are in excellent agreement with those obtained with a traditional null ellipsometer. Spectroscopic measurements at a fixed angle of incidence of a silicon dioxide film on a silicon substrate yield thicknesses that are in excel lent agreement with independent measurements made with a null ellipsometer and a commercial instrument.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 8, 2010
Manuscript Accepted: April 26, 2010
Published: May 31, 2010

Citation
Lionel R. Watkins and Sophie S. Shamailov, "Variable angle of incidence spectroscopic autocollimating ellipsometer," Appl. Opt. 49, 3231-3234 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-16-3231


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. H. M. O’Bryan, “The optical constants of several metals in vacuum,” J. Opt. Soc. Am. 26, 122–127 (1936). [CrossRef]
  2. D. Brewster, “On the phenomena and laws of elliptic polarization, as exhibited in the action of metals upon light,” Phil. Trans. Royal Soc. 120, 287–326 (1830). [CrossRef]
  3. M. Yamamoto, “New type of precision ellipsometer without employing a compensator,” Opt. Commun. 10, 200–202 (1974). [CrossRef]
  4. M. Yamamoto and O. S. Heavens, “A vacuum automatic ellipsometer for principal angle of incidence measurement,” Surf. Sci. 96, 202–216 (1980). [CrossRef]
  5. T. Yamaguchi and H. Takahashi, “Autocollimation-type ellipsometer for monitoring film growth through a single window,” Appl. Opt. 15, 677–680 (1976). [CrossRef] [PubMed]
  6. J. F. Archard, P. L. Clegg, and A. M. Taylor, “Photoelectric analysis of elliptically polarized light,” Proc. Phys. Soc. Lond. B 65, 758–768 (1952). [CrossRef]
  7. D. Chandler-Horowitz and G. A. Candela, “Principal angle spectroscopic ellipsometry utilizing a rotating analyzer,” Appl. Opt. 21, 2972–2977 (1982). [CrossRef] [PubMed]
  8. L. Schrottke and G. Jungk, “Automated null ellipsometer with rotating analyzer,” Rev. Sci. Instrum. 65, 3657–3660 (1994). [CrossRef]
  9. D. E. Aspnes, “Optimizing precision of rotating-analyzer ellipsometers,” J. Opt. Soc. Am. 64, 639–646 (1974). [CrossRef]
  10. D. E. Aspnes, “Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers,” J. Opt. Soc. Am. A 21, 403–410 (2004). [CrossRef]
  11. F. Bréhat, B. Wyncke, and A. M. Benoit, “Method for birefringence measurements as a function of wavelength in the visible range, applied to the reinvestigation of crystal quartz,” J. Phys. D: Appl. Phys. 32, 227–233 (1999). [CrossRef]
  12. R. M. A. Azzam and N. M. BasharaEllipsometry and Polarized Light (North-Holland, 1987).
  13. Thin Film Companion—SemiconSoft, Incorporated, Southborough, Mass. 01772, USA.
  14. Picometer Ellipsometer—Beaglehole Instruments, Limited, Wellington, New Zealand.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited