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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 17 — Jun. 10, 2010
  • pp: 3250–3258

Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometry

Laurent Broch, Aotmane En Naciri, and Luc Johann  »View Author Affiliations

Applied Optics, Vol. 49, Issue 17, pp. 3250-3258 (2010)

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We investigate the systematic errors at the second order for a Mueller matrix ellipsometer in the dual rotating compensator configuration. Starting from a general formalism, we derive explicit second- order errors in the Mueller matrix coefficients of a given sample. We present the errors caused by the azimuthal inaccuracy of the optical components and their influences on the measurements. We demonstrate that the methods based on four-zone or two-zone averaging measurement are effective to vanish the errors due to the compensators. For the other elements, it is shown that the systematic errors at the second order can be canceled only for some coefficients of the Mueller matrix. The calibration step for the analyzer and the polarizer is developed. This important step is necessary to avoid the azimuthal inaccuracy in such elements. Numerical simulations and experimental measurements are presented and discussed.

© 2010 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 24, 2010
Revised Manuscript: May 10, 2010
Manuscript Accepted: May 11, 2010
Published: June 2, 2010

Laurent Broch, Aotmane En Naciri, and Luc Johann, "Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometry," Appl. Opt. 49, 3250-3258 (2010)

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  1. R. W. Collins, “Dual rotating compensator” in Handbook of Ellipsometry, H.G.Tompkins and E.A.Irene, eds. (William Andrew Publishing, 2005), Chap. 7.3.3, pp. 546–566.
  2. J. S. Tyo, D. L. Goldstein, D. B. Chenault, and J. A. Shaw, “Review of passive imaging polarimetry for remote sensing applications,” Appl. Opt. 45, 5453–5469 (2006). [CrossRef] [PubMed]
  3. M. H. Smith, “Optimization of dual-rotating-retarder Mueller matrix polarimeter,” Appl. Opt. 41, 2488–2493 (2002). [CrossRef] [PubMed]
  4. D. H. Goldstein and R. A. Chipman, “Error analysis of a Mueller matrix polarimeter,” J. Opt. Soc. Am. A 7, 693–700 (1990). [CrossRef]
  5. K. M. Twietmeyer and R. A. Chipman, “Optimization of Mueller matrix polarimeter in the presence of error sources,” Opt. Express 16, 11589–11603 (2008). [CrossRef] [PubMed]
  6. M. Dubreuil, S. Rivet, B. Le Jeune, and J. Cariou, “Systematic errors specific to a snapshot Mueller matrix polarimeter,” Appl. Opt. 48, 1135–1142 (2009). [CrossRef]
  7. S.-Y. Lu and R. A. Chipman, “Interpretation of Mueller matrices on polar decomposition,” J. Opt. Soc. Am. A 13, 1106–1113 (1996). [CrossRef]
  8. R. Ossikovski, “Analysis of depolarizing Mueller matrices through a symmetric decomposition,” J. Opt. Soc. Am. A 26, 1109–1118 (2009). [CrossRef]
  9. E. Bahar, “Road maps for use of Mueller matrix measurements to detect and identify biological and chemical materials through their optical activity: potential applications in biomedicine, biochemistry, security and industry,” J. Opt. Soc. Am. B 26, 364–370 (2009). [CrossRef]
  10. L. Broch, A. En Naciri, and L. Johann, “Systematic errors for a Mueller matrix dual rotating compensator ellipsometer,” Opt. Express 16, 8814–8824 (2008). [CrossRef] [PubMed]
  11. G. Piller, L. Broch, and L. Johann, “Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer,” Phys. Status Solidi C 5, 1027–1030(2008). [CrossRef]
  12. E. Compain, S. Poirier, and B. Drevillon, “General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometers,” Appl. Opt. 38, 3490–3502 (1999). [CrossRef]
  13. F. Le Roy-Brehonnet and B. Le Jeune, “Utilization of Mueller matrix formalism to obtain optical targets depolarization and polarization properties,” Prog. Quantum Electron. 21, 109–151 (1997). [CrossRef]

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