OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 22 — Aug. 1, 2010
  • pp: 4270–4277

Iteratively-reweighted local model fitting method for adaptive and accurate single-shot surface profiling

Nozomi Kurihara, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki  »View Author Affiliations

Applied Optics, Vol. 49, Issue 22, pp. 4270-4277 (2010)

View Full Text Article

Enhanced HTML    Acrobat PDF (2166 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The local model fitting (LMF) method is one of the useful single-shot surface profiling algorithms. The measurement principle of the LMF method relies on the assumption that the target surface is locally flat. Based on this assumption, the height of the surface at each pixel is estimated from pixel values in its vicinity. Therefore, we can estimate flat areas of the target surface precisely, whereas the measurement accuracy could be degraded in areas where the assumption is violated, because of a curved surface or sharp steps. In this paper, we propose to overcome this problem by weighting the contribution of the pixels according to the degree of satisfaction of the locally flat assumption. However, since we have no information on the surface profile beforehand, we iteratively estimate it and use this estimation result to determine the weights. This algorithm is named the iteratively-reweighted LMF (IRLMF) method. Experimental results show that the proposed algorithm works excellently.

© 2010 Optical Society of America

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Optics at Surfaces

Original Manuscript: May 14, 2010
Manuscript Accepted: July 2, 2010
Published: July 28, 2010

Nozomi Kurihara, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki, "Iteratively-reweighted local model fitting method for adaptive and accurate single-shot surface profiling," Appl. Opt. 49, 4270-4277 (2010)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. J. H. Brunning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wave front measuring interferometer for testing optical surface and lenses,” Appl. Opt. 13, 2693–2703 (1974). [CrossRef]
  2. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160(1982). [CrossRef]
  3. J. Kato, I. Yamaguchi, T. Nakamura, and S. Kuwashima, “Video-rate fringe analyzer based on phase-shifting electronic moiré patterns,” Appl. Opt. 36, 8403–8412 (1997). [CrossRef]
  4. D. C. Williams, N. S. Nassar, J. E. Banyard, and M. S. Virdee, “Digital phase-step interferometry: a simplified approach,” Opt. Laser Technol. 23, 147–150 (1991). [CrossRef]
  5. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, “Dynamic interferometry,” Proc. SPIE 5875, 58750F (2005). [CrossRef]
  6. M. Sugiyama, H. Ogawa, K. Kitagawa, and K. Suzuki, “Single-shot surface profiling by local model fitting,” Appl. Opt. 45, 7999–8005 (2006). [CrossRef]
  7. M. Takeda and T. Abe, “Phase unwrapping by a maximum cross-amplitude spanning tree algorithm: a comparative study,” Opt. Eng. 35, 2345–2351 (1996). [CrossRef]
  8. See http://www.cable-net.ne.jp/corp/torayins/SP-500.html for details.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited