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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 22 — Aug. 1, 2010
  • pp: 4270–4277

Iteratively-reweighted local model fitting method for adaptive and accurate single-shot surface profiling

Nozomi Kurihara, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki  »View Author Affiliations


Applied Optics, Vol. 49, Issue 22, pp. 4270-4277 (2010)
http://dx.doi.org/10.1364/AO.49.004270


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Abstract

The local model fitting (LMF) method is one of the useful single-shot surface profiling algorithms. The measurement principle of the LMF method relies on the assumption that the target surface is locally flat. Based on this assumption, the height of the surface at each pixel is estimated from pixel values in its vicinity. Therefore, we can estimate flat areas of the target surface precisely, whereas the measurement accuracy could be degraded in areas where the assumption is violated, because of a curved surface or sharp steps. In this paper, we propose to overcome this problem by weighting the contribution of the pixels according to the degree of satisfaction of the locally flat assumption. However, since we have no information on the surface profile beforehand, we iteratively estimate it and use this estimation result to determine the weights. This algorithm is named the iteratively-reweighted LMF (IRLMF) method. Experimental results show that the proposed algorithm works excellently.

© 2010 Optical Society of America

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Optics at Surfaces

History
Original Manuscript: May 14, 2010
Manuscript Accepted: July 2, 2010
Published: July 28, 2010

Citation
Nozomi Kurihara, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki, "Iteratively-reweighted local model fitting method for adaptive and accurate single-shot surface profiling," Appl. Opt. 49, 4270-4277 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-22-4270

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