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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 23 — Aug. 10, 2010
  • pp: 4420–4426

Simultaneous displacement and angular drift measurement based on defocus grating

Haotong Ma, Fengjie Xi, Xiaolin Wang, Liang Liu, Yanxing Ma, Pu Zhou, Xiaojun Xu, Zejin Liu, and Xiuxiang Chu  »View Author Affiliations

Applied Optics, Vol. 49, Issue 23, pp. 4420-4426 (2010)

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We propose and demonstrate a displacement and angular drift simultaneous measurement technique based on a defocus grating. The displacement and angular drift of the incident beam can be detected by monitoring the movements of ± 1 diffraction order spots of the defocus grating. The relationship between drift of the incident beam and movements of ± 1 diffraction order spots is studied in detail. Compared with other methods, this technique eliminates the requirement of two or more detecting systems for measuring displacement and angular drift simultaneously. The proof-of-principle experiment shows that the root-mean-square errors of displacement and angular drift measurements are less than 0.5 μm and 0.84 μrad , respectively.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(110.2970) Imaging systems : Image detection systems
(220.1140) Optical design and fabrication : Alignment

ToC Category:
Imaging Systems

Original Manuscript: April 22, 2010
Revised Manuscript: July 11, 2010
Manuscript Accepted: July 15, 2010
Published: August 5, 2010

Haotong Ma, Fengjie Xi, Xiaolin Wang, Liang Liu, Yanxing Ma, Pu Zhou, Xiaojun Xu, Zejin Liu, and Xiuxiang Chu, "Simultaneous displacement and angular drift measurement based on defocus grating," Appl. Opt. 49, 4420-4426 (2010)

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