Substrate temperature and strain during sputter deposition of aluminum on cast borosilicate glass in a Gemini Observatory coating chamber
Applied Optics, Vol. 49, Issue 24, pp. 4610-4620 (2010)
http://dx.doi.org/10.1364/AO.49.004610
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Abstract
Temperature and strain measurements obtained during coating of spin-cast borosilicate samples are presented here with an analysis of these results. These tests were performed for the Large Synoptic Survey Telescope (LSST) project to verify the possible use of sputtering deposition of optical coating on its large
© 2010 Optical Society of America
OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.4925) Thin films : Other properties (stress, chemical, etc.)
ToC Category:
Thin Films
History
Original Manuscript: March 15, 2010
Revised Manuscript: July 15, 2010
Manuscript Accepted: July 22, 2010
Published: August 18, 2010
Citation
Jacques Sebag, John Andrew, Douglas Neill, and Michael Warner, "Substrate temperature and strain during sputter deposition of aluminum on cast borosilicate glass in a Gemini Observatory coating chamber," Appl. Opt. 49, 4610-4620 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-24-4610
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